Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068212 | Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements | Marcus Adrianus Van De Kerkhof, M'hamed Akhssay, Mamoun El Ouasdad | 2011-11-29 |
| 7829249 | Device manufacturing method, computer program and lithographic apparatus | Marcus Adrianus Van De Kerkhof, M'hamed Akhssay, Mamoun El Ouasdad | 2010-11-09 |