| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Klaus Simon +16 more |
2015-10-06 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Klaus Simon +16 more |
2015-07-14 |
| 9057967 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2015-06-16 |
| 8947637 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert |
2015-02-03 |
| 8830446 |
Exposure apparatus |
Arjen Boogaard, Wilhelmus Sebastianus Marcus Maria Ketelaars, Carolus Ida Maria Antonius Spee |
2014-09-09 |
| 8711333 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard |
2014-04-29 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2014-01-21 |
| 8629418 |
Lithographic apparatus and sensor therefor |
Marcus Adrianus Van De Kerkhof, Haico Victor Kok, Borgert Kruizinga, Bearrach Moest, Marc Antonius Maria Haast +3 more |
2014-01-14 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-10-15 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2013-10-01 |
| 8542341 |
Exposure apparatus |
Arjen Boogaard, Wilhelmus Sebastianus Marcus Maria Ketelaars, Carolus Ida Maria Antonius Spee |
2013-09-24 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Klaus Simon +16 more |
2013-07-09 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-06-25 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2012-04-10 |
| 8054445 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Christiaan Alexander Hoogendam, Anthonie Kuijper |
2011-11-08 |
| 8035798 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert |
2011-10-11 |
| 7924406 |
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels |
Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Laurentius Catrinus Jorritsma +2 more |
2011-04-12 |
| 7907255 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert |
2011-03-15 |
| 7903234 |
Lithographic apparatus, device manufacturing method and computer program product |
Judocus Marie Dominicus Stoeldraijer, Erik Roelof Loopstra, Heine Melle Mulder, Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma +1 more |
2011-03-08 |
| 7671968 |
Lithographic apparatus having masking parts and device manufacturing method |
Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Laurentius Catrinus Jorritsma +2 more |
2010-03-02 |
| 7619747 |
Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device |
Marcus Adrianus Van De Kerkhof |
2009-11-17 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2009-09-22 |
| 7593093 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2009-09-22 |