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Lithographic apparatus and method for manufacturing a device |
Nicolaas Antonius Allegondus Johannes Van Asten, Wilhelmus Josephus Box, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier, Erik Roelof Loopstra +6 more |
2009-06-02 |
| 7528929 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2009-05-05 |
| 7453078 |
Sensor for use in a lithographic apparatus |
Haico Victor Kok, Marcus Adrianus Van De Kerhof, Borgert Kruizinga, Bearrach Moest, Marc Antonius Maria Haast +3 more |
2008-11-18 |
| 7450217 |
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Arjen Boogaard, Wilhelmus Sebastianus Marcus Maria Ketelaars, Carolus Ida Maria Antonius Spee |
2008-11-11 |
| 7282701 |
Sensor for use in a lithographic apparatus |
Haico Victor Kok, Marcus Adrianus Van De Kerhof, Borgert Kruizinga, Bearrach Moest, Marc Antonius Maria Haast +3 more |
2007-10-16 |
| 7224436 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2007-05-29 |
| 7213963 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Klaus Simon +16 more |
2007-05-08 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2007-04-03 |
| 7184122 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard |
2007-02-27 |
| 7075616 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2006-07-11 |