| 10303066 |
Lithographic projection apparatus and device manufacturing method |
— |
2019-05-28 |
| 10261428 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2019-04-16 |
| 10248034 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2019-04-02 |
| 10234768 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2019-03-19 |
| 10222706 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2019-03-05 |
| 10197927 |
Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or grating |
Nicolaas Ten Kate |
2019-02-05 |
| 10191389 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2019-01-29 |
| 10146142 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more |
2018-12-04 |
| 9990462 |
Computational wafer inspection |
Christophe David Fouquet, Bernardo Kastrup, Arie Jeffrey Den Boef, James Benedict Kavanagh, James Patrick Koonmen +1 more |
2018-06-05 |
| 9989861 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2018-06-05 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2018-04-24 |
| 9885965 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2018-02-06 |
| 9829799 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2017-11-28 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2017-10-24 |
| 9740107 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2017-08-22 |
| 9703210 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-07-11 |
| 9696635 |
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process |
Adrianus Fransiscus Petrus Engelen, Henricus Johannes Lambertus Megens, Robert Kazinczi, Jen-Shiang Wang |
2017-07-04 |
| 9651875 |
Illumination system and lithographic apparatus |
Heine Melle Mulder, Steven George Hansen, Markus Deguenther |
2017-05-16 |
| 9639006 |
Lithographic projection apparatus and device manufacturing method |
— |
2017-05-02 |
| 9623436 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra |
2017-04-18 |
| 9606448 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more |
2017-03-28 |
| 9588442 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2017-03-07 |
| 9568840 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2017-02-14 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |
| 9507907 |
Computational wafer inspection |
Christophe David Fouquet, Bernardo Kastrup, Arie Jeffrey Den Boef, James Benedict Kavanagh, James Patrick Koonmen +1 more |
2016-11-29 |