| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra +8 more |
2016-11-01 |
| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2016-11-01 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 9477159 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2016-10-25 |
| 9465302 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Erik Henricus Egidius Catharina Eummelen +7 more |
2016-10-11 |
| 9459537 |
System and method to ensure source and image stability |
Yu Cao, Jun Ye, Venugopal Vellanki |
2016-10-04 |
| 9442388 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more |
2016-09-13 |
| 9417519 |
Lithographic apparatus, device manufacturing method, and method of correcting a mask |
— |
2016-08-16 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2016-06-14 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2016-06-07 |
| 9330912 |
Lithographic apparatus, fluid combining unit and device manufacturing method |
Matthew Lipson, Harry Sewell, Louis John Markoya |
2016-05-03 |
| 9285685 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graupner +1 more |
2016-03-15 |
| 9207543 |
Lithographic apparatus and device manufacturing method involving a groove to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2015-12-08 |
| 9195153 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more |
2015-11-24 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-10-06 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9116439 |
Illumination system and lithographic apparatus |
Heine Melle Mulder, Steven George Hansen, Markus Deguenther |
2015-08-25 |
| 9104117 |
Lithographic apparatus having a liquid detection system |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens |
2015-08-11 |
| 9097987 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2015-08-04 |
| 9091940 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Joeri Lof, Erik Roelof Loopstra +7 more |
2015-07-28 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-07-14 |
| 9057967 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2015-06-16 |
| 9036127 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Erik Henricus Egidius Catharina Eummelen +7 more |
2015-05-19 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2015-02-24 |
