| 8542343 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2013-09-24 |
| 8514369 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2013-08-20 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2013-07-09 |
| 8472006 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Paul Graupner, Jan Haisma, Nicodemus Hattu +3 more |
2013-06-25 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-06-25 |
| 8446568 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2013-05-21 |
| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Erik Henricus Egidius Catharina Eummelen +16 more |
2013-03-26 |
| 8400615 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2013-03-19 |
| 8354209 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam |
2013-01-15 |
| 8319939 |
Immersion lithographic apparatus and device manufacturing method detecting residual liquid |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens |
2012-11-27 |
| 8259289 |
Lithographic apparatus and device manufacturing method |
Robert-Han Munnig Schmidt |
2012-09-04 |
| 8237912 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Huibert Visser, Peter Julian Pollard |
2012-08-07 |
| 8218125 |
Immersion lithographic apparatus with a projection system having an isolated or movable part |
— |
2012-07-10 |
| 8208123 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Hendricus Johannes Maria Meijer +3 more |
2012-06-26 |
| 8208124 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra |
2012-06-26 |
| 8208120 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +8 more |
2012-06-26 |
| 8174674 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Paul Graupner, Erik Roelof Loopstra, Bob Streefkerk |
2012-05-08 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2012-04-10 |
| 8115899 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2012-02-14 |
| 8102507 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam |
2012-01-24 |
| 8045135 |
Lithographic apparatus with a fluid combining unit and related device manufacturing method |
Matthew Lipson, Harry Sewell, Louis John Markoya |
2011-10-25 |
| 8027026 |
Lithographic apparatus and device manufacturing method |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk, Ronald A. Wilklow +1 more |
2011-09-27 |
| 7982850 |
Immersion lithographic apparatus and device manufacturing method with gas supply |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2011-07-19 |
| 7969549 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Huibert Visser, Peter Julian Pollard |
2011-06-28 |
| 7961293 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner +1 more |
2011-06-14 |
