| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2011-05-03 |
| 7932999 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2011-04-26 |
| 7898642 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2011-03-01 |
| 7894040 |
Lithographic apparatus and device manufacturing method |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk, Ronald A. Wilklow +1 more |
2011-02-22 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2011-02-01 |
| 7868998 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2011-01-11 |
| 7843551 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2010-11-30 |
| 7834977 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +1 more |
2010-11-16 |
| 7826030 |
Lithographic apparatus and device manufacturing method |
— |
2010-11-02 |
| 7817245 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2010-10-19 |
| 7812924 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Bob Streefkerk |
2010-10-12 |
| 7795603 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more |
2010-09-14 |
| 7763355 |
Device manufacturing method, top coat material and substrate |
Marcel Mathijs Theodore Marie Dierichs |
2010-07-27 |
| 7746445 |
Lithographic apparatus, device manufacturing method and a substrate |
Marcel Mathijs Theodore Marie Dierichs, Bob Streefkerk |
2010-06-29 |
| 7715107 |
Optical element for correction of aberration, and a lithographic apparatus comprising same |
Erik Roelof Loopstra, Paul Graupner |
2010-05-11 |
| 7670730 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam |
2010-03-02 |
| 7656502 |
Lithographic apparatus and device manufacturing method |
Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Rudolf Kemper +8 more |
2010-02-02 |
| 7652751 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +1 more |
2010-01-26 |
| 7643127 |
Prewetting of substrate before immersion exposure |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Bob Streefkerk |
2010-01-05 |
| 7616383 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra |
2009-11-10 |
| 7593093 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2009-09-22 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2009-09-22 |
| 7589818 |
Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus |
Marinus Aart Van Den Brink, Erik Roelof Loopstra |
2009-09-15 |
| 7567338 |
Lithographic apparatus and device manufacturing method |
Robert-Han Munnig Schmidt |
2009-07-28 |
| 7545481 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Paul Graupner, Jan Haisma, Nicodemus Hattu +3 more |
2009-06-09 |
