| 8964163 |
Immersion lithographic apparatus and device manufacturing method with a projection system having a part movable relative to another part |
— |
2015-02-24 |
| 8947636 |
Lithographic apparatus, device manufacturing method, and substrate exchanging method |
Theodorus Petrus Maria Cadee, Jan Jaap Kuit, Koen Jacobus Johannes Maria Zaal |
2015-02-03 |
| 8941811 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-01-27 |
| 8860923 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2014-10-14 |
| 8848162 |
Lithographic apparatus and device manufacturing method |
— |
2014-09-30 |
| 8804097 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra |
2014-08-12 |
| 8797503 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2014-08-05 |
| 8755033 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2014-06-17 |
| 8755027 |
Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk, Ronald A. Wilklow +1 more |
2014-06-17 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8711326 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ronald Van Der Ham, Martinus Hendrikus Antonius Leenders, Richard Moerman, Michel Riepen, Sergei Shulepov +8 more |
2014-04-29 |
| 8711330 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner +1 more |
2014-04-29 |
| 8704998 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2014-04-22 |
| 8638419 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-28 |
| 8638418 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2014-01-28 |
| 8638415 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra |
2014-01-28 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2014-01-21 |
| 8629970 |
Immersion lithographic apparatus with immersion fluid re-circulating system |
Harry Sewell, Erik Roelof Loopstra, Louis John Markoya, Diane McCafferty |
2014-01-14 |
| 8614784 |
Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply |
Michel Riepen, Nicolaas Rudolf Kemper, Rogier Hendrikus Magdalena Cortie, Ralph Joseph Meijers, Fabrizio Evangelista |
2013-12-24 |
| 8587762 |
Methods relating to immersion lithography and an immersion lithographic apparatus |
Bob Streefkerk, Roelof Frederik De Graaf, Marcel Beckers, Paul Petrus Joannes Berkvens, David Lucien Anstotz |
2013-11-19 |
| 8570486 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Paul Graupner, Erik Roelof Loopstra, Bob Streefkerk |
2013-10-29 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-10-15 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2013-10-01 |
| 8542344 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2013-09-24 |
