| 7535644 |
Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Wilhelmus Petrus De Boeij, Tammo Uitterdijk |
2009-05-19 |
| 7528929 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2009-05-05 |
| 7508487 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Paul Van Der Veen, Willem Van Schaik, Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors +1 more |
2009-03-24 |
| 7491661 |
Device manufacturing method, top coat material and substrate |
Marcel Mathijs Theodore Marie Dierichs |
2009-02-17 |
| 7483118 |
Lithographic projection apparatus and device manufacturing method |
— |
2009-01-27 |
| 7482611 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more |
2009-01-27 |
| 7463330 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens |
2008-12-09 |
| 7433015 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Paul Graupner, Erik Roelof Loopstra, Bob Streefkerk |
2008-10-07 |
| 7411653 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2008-08-12 |
| 7388648 |
Lithographic projection apparatus |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2008-06-17 |
| 7379159 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +1 more |
2008-05-27 |
| 7375796 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogedam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +1 more |
2008-05-20 |
| 7372541 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +8 more |
2008-05-13 |
| 7368744 |
Photon sieve for optical systems in micro-lithography |
— |
2008-05-06 |
| 7352435 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner +1 more |
2008-04-01 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more |
2008-04-01 |
| 7324185 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2008-01-29 |
| 7283208 |
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby |
Paul Van Der Veen, Roel De Jonge, Roland Pieter Stolk |
2007-10-16 |
| 7248334 |
Sensor shield |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +1 more |
2007-07-24 |
| 7245353 |
Lithographic apparatus, device manufacturing method |
Wil{acute over (h)}elmus Petrus De Boeij, Carsten Kohler |
2007-07-17 |
| 7245355 |
Lithographic apparatus, device manufacturing method |
Wilhelmus Petrus De Boeij, Carsten Kohler |
2007-07-17 |
| 7224431 |
Lithographic apparatus and device manufacturing method |
Johannes Christiaan Maria Jasper |
2007-05-29 |
| 7224436 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2007-05-29 |
| 7213963 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2007-05-08 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2007-04-03 |
