| 7924403 |
Lithographic apparatus and device and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Tammo Uitterdijk |
2011-04-12 |
| 7561250 |
Lithographic apparatus having parts with a coated film adhered thereto |
Menno Fien, Erik Roelof Loopstra, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +3 more |
2009-07-14 |
| 7361911 |
Lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Robertus Nicodemus Jacobus Van Ballegoij, Vadim Yevgenyevich Banine, Gert-Jan Heerens, Frederik T. E. Heuts +2 more |
2008-04-22 |
| 7274431 |
Lithographic projection apparatus and device manufacturing method |
Wilhelmus Josephus Box, Johannes Henricus Wilhelmus Jacobs, Thijs Harink |
2007-09-25 |
| 7253880 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Petrus Rutgerus Bartray, Antonius Johannes Josephus Van Dijsseldonk |
2007-08-07 |
| 7202934 |
Lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Erik Ham, Gert-Jan Heerens, Erik Roelof Loopstra, Henri Gerard Cato Werij |
2007-04-10 |
| 7126664 |
Lithographic apparatus and a device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Petrus Rutgerus Bartray, Johannes Henricus Wilhelmus Jacobs, Thijs Harink |
2006-10-24 |
| 7078708 |
Lithographic apparatus and method of manufacturing a device and method of performing maintenance |
Pertrus Bartray, Mustafa Amhaouch, Angelo Alexander Michael Van Engelen, Tim Anton Johan Meesters, Franciscus Catharina Bernardus Marinus Van Vroonhoven |
2006-07-18 |
| 6870601 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Erik Roelof Loopstra, Harry Borggreve |
2005-03-22 |
| 5179897 |
Pattern repeat presetting of a multi-color rotary screen printing machine |
— |
1993-01-19 |