Issued Patents All Time
Showing 201–225 of 328 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7859686 | Lithographic apparatus and method for calibrating the same | Leon Martin Levasier, Rene Oesterholt | 2010-12-28 |
| 7830497 | System and method for using a two part cover and a box for protecting a reticle | Santiago del Puerto, Andrew Massar, Duane P. Kish, Abdullah Alikhan, Woodrow J. Olsen +1 more | 2010-11-09 |
| 7808614 | Lithographic apparatus and device manufacturing method | Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Martinus Hendrickus Antonius Leenders, Bob Streefkerk +3 more | 2010-10-05 |
| 7804579 | Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product | Engelbertus Antonlus Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst | 2010-09-28 |
| 7804575 | Lithographic apparatus and device manufacturing method having liquid evaporation control | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more | 2010-09-28 |
| 7795603 | Lithographic apparatus and device manufacturing method | Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more | 2010-09-14 |
| 7751027 | Lithographic apparatus and device manufacturing method | Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders +6 more | 2010-07-06 |
| 7746447 | Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus | Koen Jacobus Johannes Maria Zaal, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Frederik Eduard De Jong | 2010-06-29 |
| 7733459 | Lithographic apparatus and device manufacturing method | Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +4 more | 2010-06-08 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg, Laurentius Catrinus Jorritsma +7 more | 2010-05-25 |
| 7715107 | Optical element for correction of aberration, and a lithographic apparatus comprising same | Paul Graupner, Johannes Catharinus Hubertus Mulkens | 2010-05-11 |
| 7714981 | Lithographic apparatus and method | Johannes Onvlee | 2010-05-11 |
| 7710540 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Jeroen Johannes Sophia Maria Mertens, Wilhelmus Franciscus Johannes Simons, Paul Petrus Joannes Berkvens | 2010-05-04 |
| 7696652 | Electromagnetic actuator, method of manufacturing a part of an electromagnetic actuator, and lithographic apparatus comprising and electromagnetic actuator | Sven Antoin Johan Hol | 2010-04-13 |
| 7692765 | Lithographic apparatus and method of removing liquid | Hernes Jacobs, Michel Riepen, Eva Mondt | 2010-04-06 |
| 7671970 | Stage apparatus with two patterning devices, lithographic apparatus and device manufacturing method skipping an exposure field pitch | — | 2010-03-02 |
| 7671968 | Lithographic apparatus having masking parts and device manufacturing method | Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more | 2010-03-02 |
| 7667822 | Lithographic apparatus and stage apparatus | Fransicus Mathijs Jacobs, Harmen Klaas Van Der Schoot, Arjan Franklin Bakker, Arjan Martin Van Der Wel, Krijn Frederik Bustraan +1 more | 2010-02-23 |
| 7656502 | Lithographic apparatus and device manufacturing method | Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Nicolaas Rudolf Kemper, Nicolaas Ten Kate +8 more | 2010-02-02 |
| 7636165 | Displacement measurement systems lithographic apparatus and device manufacturing method | Renatus Gerardus Klaver, Engelbertus Antonius Fransiscus Van Der Pasch | 2009-12-22 |
| 7633599 | Apparatuses and methods for changing an intensity distribution of light within an illumination field without distorting the telecentricity of the light | Stephen Roux, Michael L. Nelson | 2009-12-15 |
| 7619207 | Lithographic apparatus and device manufacturing method | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Onno Bram Loopstra | 2009-11-17 |
| 7616383 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens | 2009-11-10 |
| 7612867 | Lithographic apparatus | Gerard Van Schothorst, Fransiscus Hendrikus Van Deuren, Jan Van Eijk, Robert-Han Munnig Schmidt, Felix Godfried Peter Peeters | 2009-11-03 |
| 7593092 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more | 2009-09-22 |