| 7423722 |
Lithographic apparatus and device manufacturing method |
Albert Johannes Maria Jansen, Jan Jaap Kuit, Raymond Laurentius Johannes Schrijver |
2008-09-09 |
| 7423733 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders |
2008-09-09 |
| 7418902 |
Imprint lithography including alignment |
Yvonne Wendela Kruijt-Stegeman, Aleksey Yurievich Kolensnychenko, Helmar Van Santen |
2008-09-02 |
| 7417715 |
Stage apparatus, lithographic apparatus and device manufacturing method using two patterning devices |
— |
2008-08-26 |
| 7411653 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2008-08-12 |
| 7408655 |
Lithographic apparatus and method for calibrating the same |
Leon Martin Levasier, Rene Oesterholt |
2008-08-05 |
| 7405805 |
Lithographic apparatus and device manufacturing method |
Tammo Uitterdijk, Laurens Anthony Sanderse |
2008-07-29 |
| 7388648 |
Lithographic projection apparatus |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Theodorus Marinus Modderman +7 more |
2008-06-17 |
| 7377764 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Aleksey Yurievich Kolesnychenko, Johan Frederik Dijksman, Helmar Van Santen, Sander Frederik Wuister |
2008-05-27 |
| 7372541 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Theodorus Marinus Modderman +8 more |
2008-05-13 |
| 7362446 |
Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit |
Engelbertus Antonius Fransiscus Van Der Pasch |
2008-04-22 |
| 7362413 |
Uniformity correction for lithographic apparatus |
Alexander Kremer, Marcel Mathijs Theodore Marie Dierichs |
2008-04-22 |
| 7359029 |
Lithographic apparatus and method of reducing thermal distortion |
Jozef Maria Finders |
2008-04-15 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more |
2008-04-01 |
| 7352433 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Bernard Gellrich, Andreas Wurmbrand |
2008-04-01 |
| RE40043 |
Positioning device having two object holders |
Yim-Bun Patrick Kwan, Gerrit Maarten Bonnema, Harmen Klaas Van Der Schoot, Gerjan P. Veldhuis |
2008-02-05 |
| 7310132 |
Lithographic apparatus and device manufacturing method |
Harmen Klaas Van Der Schoot, Fransicus Mathijs Jacobs, Godfried Katharina Hubertus Franciscus Geelen |
2007-12-18 |
| 7292312 |
Lithographic apparatus and method for calibrating the same |
Leon Martin Levasier, Rene Oesterholt |
2007-11-06 |
| 7256871 |
Lithographic apparatus and method for calibrating the same |
Leon Martin Levasier, Rene Oesterholt |
2007-08-14 |
| 7256864 |
Liquid immersion lithography system having a tilted showerhead relative to a substrate |
Nicolaas Ten Kate, Aleksandr Khmelichek, Louis John Markoya, Harry Sewell |
2007-08-14 |
| 7253880 |
Lithographic apparatus and device manufacturing method |
Petrus Rutgerus Bartray, Antonius Johannes Josephus Van Dijsseldonk, Paulus Martinus Maria Liebregts |
2007-08-07 |
| 7248339 |
Lithographic apparatus and device manufacturing method |
Gerard Van Schothorst, Jan Van Eijk, Robert-Han Munnig Schmidt, Felix Godfried Peter Peeters |
2007-07-24 |
| 7230675 |
Lithographic apparatus, device manufacturing method and device manufactured therewith |
Stefan Geerte Kruijswijk |
2007-06-12 |
| 7230676 |
Lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch |
2007-06-12 |
| 7224436 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Jeroen Johannes Sophia Maria Mertens +4 more |
2007-05-29 |