| 6952253 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Theodorus Marinus Modderman +7 more |
2005-10-04 |
| 6927403 |
Illumination system that suppresses debris from a light source |
Wolfgang Singer, Martin Antoni, Johannes Wangler, Wilhelm Egle, Vadim Yevgenyevich Banine |
2005-08-09 |
| 6906783 |
System for using a two part cover for protecting a reticle |
Santiago del Puerto, Andrew Massar, Duane P. Kish, Abdullah Alikhan, Woodrow J. Olson +1 more |
2005-06-14 |
| 6894261 |
Position measuring system for use in lithographic apparatus |
Thomas Josephus Maria Castenmiller, Andreas Ariens, Martinus Hendricus Hoeks, Patrick David Vogelsang, YimBun P. Kwan |
2005-05-17 |
| 6879374 |
Device manufacturing method, device manufactured thereby and a mask for use in the method |
Jan Evert Van Der Werf, Hans Meiling, Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders |
2005-04-12 |
| 6875992 |
Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method |
Thomas Josephus Maria Castenmiller, Andreas Ariens, Martinus Hendricus Hoeks, Patrick David Vogelsang, YimBun P. Kwan |
2005-04-05 |
| 6870601 |
Lithographic apparatus and device manufacturing method |
Paulus Martinus Maria Liebregts, Arno Jan Bleeker, Harry Borggreve |
2005-03-22 |
| 6853440 |
Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination |
Engelbertus A. F. van de Pasch, Marcel Hendrikus Maria Beems, Hendricus Johannes Maria Meijer, Daniel N. Galburt |
2005-02-08 |
| 6791443 |
Actuator and transducer |
— |
2004-09-14 |
| 6781673 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser +4 more |
2004-08-24 |
| 6765218 |
Lithographic projection apparatus with positioning system for use with reflectors |
Antonius Johannes Josephus Van Dijsseldonk |
2004-07-20 |
| 6750949 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors, Albrecht Hof +3 more |
2004-06-15 |
| 6741329 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors, Noud Jan Gilissen, Markus Franciscus Antonius Eurlings |
2004-05-25 |
| 6730920 |
Abbe arm calibration system for use in lithographic apparatus |
Rogier Herman Mathijs Groeneveld, Jacobus Burghoom, Leon Martin Levasier, Alexander Straaijer |
2004-05-04 |
| 6721389 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan +1 more |
2004-04-13 |
| 6710353 |
Actuator and transducer |
— |
2004-03-23 |
| 6674510 |
Off-axis levelling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten, Frederik T. E. Heuts +5 more |
2004-01-06 |
| 6597431 |
Lithographic projection apparatus and device manufacturing method |
Jozef Petrus Henricus Benschop, Oscar Fransiscus Jozephus Noordman, Michael J. M. Renkens, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more |
2003-07-22 |
| 6593585 |
Lithographic projection apparatus with positioning system for use with reflectors |
Antonius Johannes Josephus Van Dijsseldonk |
2003-07-15 |
| 6555834 |
Gas flushing system for use in lithographic apparatus |
— |
2003-04-29 |
| 6542220 |
Purge gas systems for use in lithographic projection apparatus |
Raymond Laurentius Johannes Schrijver, Tjarko Adriaan Rudolf Van Empel, Marcel Koenraad Marie Baggen, Bernardus Antonius Johannes Luttikhuis, Yim-Bun Patrick Kwan |
2003-04-01 |
| 6509951 |
Lithographic projection apparatus having a temperature controlled heat shield |
Yim-Bun Patrick Kwan, Marcel Johannus Elisabeth Hubertus Muitjens, Sonja T. De Vrieze-Voorn |
2003-01-21 |
| 6337484 |
Positioning device and lithographic projection apparatus comprising such a device |
Adrianus G. Bouwer, Henricus Wilhelmus Aloysius Janssen, Harmen Klaas Van Der Schoot |
2002-01-08 |
| 6262796 |
Positioning device having two object holders |
Gerrit Maarten Bonnema, Harmen Klaas Van Der Schoot, Gerjan P. Veldhuis, Yim-Bun Patrick Kwan |
2001-07-17 |
| 6208407 |
Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement |
— |
2001-03-27 |