Issued Patents All Time
Showing 326–328 of 328 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6054784 | Positioning device having three coil systems mutually enclosing angles of 120.degree. and lithographic device comprising such a positioning device | Frank Bernhard Sperling, Antonius T.A. Peijnenburg | 2000-04-25 |
| 6020964 | Interferometer system and lithograph apparatus including an interferometer system | Alexander Straaijer | 2000-02-01 |
| 5969441 | Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device | Gerrit Maarten Bonnema, Harmen Klaas Van Der Schoot, Gerjan P. Veldhuis, Paulus M. H. Ter Beek | 1999-10-19 |