Issued Patents All Time
Showing 276–300 of 328 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7213963 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2007-05-08 |
| 7209220 | System for using a two part cover for and a box for protecting a reticle | Santiago del Puerto, Andrew Massar, Duane P. Kish, Abdullah Alikhan, Woodrow J. Olson +1 more | 2007-04-24 |
| 7202934 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Erik Ham, Gert-Jan Heerens, Paulus Martinus Maria Liebregts, Henri Gerard Cato Werij | 2007-04-10 |
| 7199858 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more | 2007-04-03 |
| 7193681 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Erik Theodorus Maria Bijlaart, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk | 2007-03-20 |
| 7193232 | Lithographic apparatus and device manufacturing method with substrate measurement not through liquid | Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more | 2007-03-20 |
| 7170586 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Jeroen Jonkers | 2007-01-30 |
| 7161267 | Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby | Sven Antoin Johan Hol, Johan Cornelis Compter, Patricia Vreugdewater | 2007-01-09 |
| 7161659 | Dual stage lithographic apparatus and device manufacturing method | Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop | 2007-01-09 |
| 7136214 | Active faceted mirror system for lithography | Stephen Roux | 2006-11-14 |
| 7119883 | Correcting variations in the intensity of light within an illumination field without distorting the telecentricity of the light | Stephen Roux, Michael L. Nelson | 2006-10-10 |
| 7119874 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Helmar Van Santen | 2006-10-10 |
| 7116399 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Wilhelmus Josephus Box, Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Martinus Hendrikus Antonius Leenders, Josephus Jacobus Smits +1 more | 2006-10-03 |
| 7110081 | Lithographic apparatus and device manufacturing method | Christian Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Antonius Theodorus Anna Maria Derksen +4 more | 2006-09-19 |
| 7110083 | Lithographic apparatus and device manufacturing method | Dominicus Jacobus Petrus Adrianus Franken | 2006-09-19 |
| 7110086 | Movable stage system, lithographic apparatus, and device manufacturing method | Robert-Han Munnig Schmidt | 2006-09-19 |
| 7105955 | Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method | Johannes Petrus Martinus Bernardus Vermeulen, Henricus Wilhelmus Aloysius Janssen | 2006-09-12 |
| 7095485 | Lithographic linear motor, lithographic apparatus, and device manufacturing method | Sven Antoin Johan Hol, Johan Cornelis Compter, Patricia Vreugdewater | 2006-08-22 |
| 7075616 | Lithographic apparatus and device manufacturing method | Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Jeroen Johannes Sophia Maria Mertens +4 more | 2006-07-11 |
| 7075620 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan +1 more | 2006-07-11 |
| 7049592 | Lithographic apparatus and device manufacturing method | Dominicus Jacobus Petrus Adrianus Franken, Pertrus Bartray, Marc Wilhelmus Maria Van Der Wijst, Michael J. M. Renkens, Gerard Van Schothorst +1 more | 2006-05-23 |
| 7030963 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Jeroen Jonkers | 2006-04-18 |
| 7019815 | Off-axis leveling in lithographic projection apparatus | Johannes Christiaan Maria Jasper, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten, Frederik T. E. Heuts +5 more | 2006-03-28 |
| 6987278 | Gas flushing system with recovery system for use in lithographic apparatus | — | 2006-01-17 |
| 6967756 | Lithographic apparatus device manufacturing method and device manufactured thereby | Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken | 2005-11-22 |