Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9152058 | Lithographic apparatus and device manufacturing method involving a member and a fluid opening | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2015-10-06 |
| 7418902 | Imprint lithography including alignment | Yvonne Wendela Kruijt-Stegeman, Helmar Van Santen, Erik Roelof Loopstra | 2008-09-02 |