| 8477287 |
Device manufacturing method, lithographic apparatus and a computer program |
Alex Oudshoorn, Leon Martin Levasier, Roland Blok |
2013-07-02 |
| 8472006 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Paul Graupner, Jan Haisma, Nicodemus Hattu +3 more |
2013-06-25 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-06-25 |
| 8462826 |
Laser device |
Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman |
2013-06-11 |
| 8446570 |
System and method for using a two part cover and a box for protecting a reticle |
Santiago del Puerto, Andrew Massar, Duane P. Kish, Abdullah Alikhan, Woodrow J. Olsen +1 more |
2013-05-21 |
| 8446568 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Johannes Catharinus Hubertus Mulkens +4 more |
2013-05-21 |
| 8431916 |
Radiation source and lithographic apparatus |
Vadim Yevgenyevich Banine, Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman |
2013-04-30 |
| 8427629 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Bob Streefkerk +3 more |
2013-04-23 |
| 8405055 |
Source module, radiation source and lithographic apparatus |
Dzmitry Labetski, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels |
2013-03-26 |
| 8390820 |
Displacement measurement system having a prism, for displacement measurement between two or more gratings |
Renatus Gerardus Klaver, Engelbertus Antonius Fransiscus Van Der Pasch |
2013-03-05 |
| 8373846 |
Radiation source, lithographic apparatus and device manufacturing method |
Gerardus Hubertus Petrus Maria Swinkels, Vadim Yevgenyevich Banine, Johannes Josephina Moors |
2013-02-12 |
| 8368902 |
Lithographic apparatus and method for calibrating the same |
Leon Martin Levasier, Rene Oesterholt |
2013-02-05 |
| 8368040 |
Radiation system and lithographic apparatus |
Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin, Dennis De Graaf +1 more |
2013-02-05 |
| 8368032 |
Radiation source, lithographic apparatus, and device manufacturing method |
Dzmitry Labetski, Gerardus Hubertus Petrus Maria Swinkels, Tom Van Zutphen |
2013-02-05 |
| 8344341 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more |
2013-01-01 |
| 8319200 |
Radiation source, lithographic apparatus and device manufacturing method |
Hendrikus Gijsbertus Schimmel, Vadim Yevgenyevich Banine, Karel Joop BOSSCHAART |
2012-11-27 |
| 8300208 |
Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus |
Maurice Willem Jozef Etiënne Wijckmans, Robertus Leonardus Tousain, Adrianus Hendrik Koevoets |
2012-10-30 |
| 8289498 |
Lithographic apparatus and device manufacturing method |
Petrus Rutgerus Bartray, Leon Martin Levasier, Bernardus Antonius Johannes Luttikhuis, Josephus Jacobus Smits, Anthonie Aantjes +7 more |
2012-10-16 |
| 8278636 |
Radiation sources and methods of generating radiation |
Hendrikus Gijsbertus Schimmel |
2012-10-02 |
| 8274641 |
Substrate table, lithographic apparatus and device manufacturing method |
Eva Mondt, Noud Jan Gilissen, Hernes Jacobs, Nicolaas Ten Kate, Marcus Martinus Petrus Adrianus Vermeulen +1 more |
2012-09-25 |
| 8269949 |
Lithographic apparatus and device manufacturing method |
Marcus Martinus Petrus Adrianus Vermeulen, Andre Bernardus Jeunink, Joost Jeroen Ottens, Rene Theodorus Petrus Compen, Peter Smits +4 more |
2012-09-18 |
| 8264670 |
Lithographic apparatus and device manufacturing method for clamping a patterning device |
Bernardus Antonius Johannes Luttikhuis, Harmen Klaas Van Der Schoot, Fransicus Mathijs Jacobs |
2012-09-11 |
| 8242471 |
Radiation source and lithographic apparatus including a contamination trap |
Wouter Anthon Soer, Vadim Yevgenyevich Banine, Tjarko Adriaan Rudolf Van Empel, Maarten Marinus Johannes Wilhelmus Van Herpen |
2012-08-14 |
| RE43576 |
Dual stage lithographic apparatus and device manufacturing method |
Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop |
2012-08-14 |
| 8232537 |
Radiation source, lithographic apparatus and device manufacturing method |
Hendrikus Gijsbertus Schimmel, Vadim Yevgenyevich Banine |
2012-07-31 |