Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8319200 | Radiation source, lithographic apparatus and device manufacturing method | Hendrikus Gijsbertus Schimmel, Vadim Yevgenyevich Banine, Erik Roelof Loopstra | 2012-11-27 |