| 8797503 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Theodorus Marinus Modderman +7 more |
2014-08-05 |
| 8760615 |
Lithographic apparatus having encoder type position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens +1 more |
2014-06-24 |
| 8755032 |
Radiation source and lithographic apparatus |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun, Gerardus Hubertus Petrus Maria Swinkels +1 more |
2014-06-17 |
| 8730485 |
Lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen |
2014-05-20 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8687166 |
Lithographic apparatus having an encoder position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens +1 more |
2014-04-01 |
| 8685632 |
Radiation source, lithographic apparatus and device manufacturing method |
Antonius Theodorus Wilhelmus Kempen, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov |
2014-04-01 |
| 8675172 |
Lithographic apparatus and method of removing liquid |
Hernes Jacobs, Michel Riepen, Eva Mondt |
2014-03-18 |
| 8638418 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2014-01-28 |
| 8638415 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens |
2014-01-28 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2014-01-21 |
| 8629971 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-14 |
| 8629970 |
Immersion lithographic apparatus with immersion fluid re-circulating system |
Harry Sewell, Johannes Catharinus Hubertus Mulkens, Louis John Markoya, Diane McCafferty |
2014-01-14 |
| 8598551 |
EUV radiation source comprising a droplet accelerator and lithographic apparatus |
Wilbert Jan Mestrom, Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman |
2013-12-03 |
| 8570486 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Johannes Jacobus Matheus Baselmans, Paul Graupner, Bob Streefkerk |
2013-10-29 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-10-15 |
| 8547525 |
EUV radiation generation apparatus |
Gerardus Hubertus Petrus Maria Swinkels, Uwe Stamm |
2013-10-01 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2013-10-01 |
| 8542344 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2013-09-24 |
| 8542343 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2013-09-24 |
| 8537330 |
Lithographic apparatus, device manufacturing method and computer readable medium |
Marius Ravensbergen, Franciscus Johannes Joseph Janssen |
2013-09-17 |
| RE44446 |
Dual stage lithographic apparatus and device manufacturing method |
Marinus Aart Van Den Brink, Joezf Petrus Henricus Benschop |
2013-08-20 |
| 8507882 |
Radiation source and lithographic apparatus |
Gerardus Hubertus Petrus Maria Swinkels, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors |
2013-08-13 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2013-07-09 |