| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Hendricus Johannes Maria Meijer +9 more |
2016-06-14 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more |
2016-06-07 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Johannes Catharinus Hubertus Mulkens +4 more |
2016-06-07 |
| 9354529 |
Arrangement for use in a projection exposure tool for microlithography having a reflective optical element |
Dirk Heinrich Ehm, Maarten Van Kampen, Stefan Schmidt, Vadim Yevgenyevich Banine |
2016-05-31 |
| 9354502 |
Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program |
Martinus Hendricus Hoeks |
2016-05-31 |
| 9329500 |
Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor |
Frank Staals, Joeri Lof, Wim Tjibbo Tel, Bearrach Moest |
2016-05-03 |
| 9298110 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device |
Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Hendrik Antony Johannes Neerhof, Adrianus Johannes Maria Van Dijk +2 more |
2016-03-29 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2016-02-23 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders +6 more |
2016-02-23 |
| 9207548 |
Radiation source with a debris mitigation system, lithographic apparatus with a debris mitigation system, method for preventing debris from depositing on collector mirror, and device manufacturing method |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors |
2015-12-08 |
| 9195153 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more |
2015-11-24 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2015-11-17 |
| 9192039 |
Radiation source |
Antonius Theodorus Wilhelmus Kempen, Corne Rentrop, Dennis De Graaf, Frits Gubbels, Gregory Richard Hayes +1 more |
2015-11-17 |
| 9182679 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Bernhard Gellrich, Andreas Wurmbrand |
2015-11-10 |
| 9164401 |
Projection system and lithographic apparatus |
Wilhelmus Petrus De Boeij, Hans Butler, Robertus Johannes Marinus De Jongh, Jan Bernard Plechelmus Van Schoot, Timotheus Franciscus Sengers +2 more |
2015-10-20 |
| 9164403 |
Radiation source, lithographic apparatus and device manufacturing method |
Antonius Theodorus Wilhelmus Kempen, Richard Joseph Bruls, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Wilbert Jan Mestrom |
2015-10-20 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-10-06 |
| 9134629 |
Illumination system, lithographic apparatus and method of forming an illumination mode |
Koen Van Ingen Schenau, Jan Bernard Plechelmus Van Schoot, Christian Wagner, Gosse Charles De Vries |
2015-09-15 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9134632 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Yim-Bun Patrick Kwan, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis +2 more |
2015-09-15 |
| 9119280 |
Radiation source |
Antonius Theodorus Wilhelmus Kempen, Christian Wagner, Henricus Gerardus Tegenbosch, Gerardus Hubertus Petrus Maria Swinkels |
2015-08-25 |
| 9110377 |
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method |
Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman, Uwe Stamm |
2015-08-18 |
| 9097987 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Johannes Catharinus Hubertus Mulkens +4 more |
2015-08-04 |
| 9097982 |
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels |
2015-08-04 |