| 9740107 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Hendricus Johannes Maria Meijer +9 more |
2017-08-22 |
| 9728931 |
Electron injector and free electron laser |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Gosse Charles De Vries, Olav Waldemar Vladimir Frijns +7 more |
2017-08-08 |
| 9726989 |
Spectral purity filter |
Wouter Anthon Soer, Vadim Yevgenyevich Banine, Andrei Mikhailovich Yakunin, Martin Jacobus Johan Jak |
2017-08-08 |
| 9715183 |
Device, lithographic apparatus, method for guiding radiation and device manufacturing method |
Wouter Dick KOEK, Arno Jan Bleeker, Heine Melle Mulder, Erwin John Van Zwet, Dries Smeets +1 more |
2017-07-25 |
| 9696636 |
Lithographic apparatus, device manufacturing method and computer program |
Patricius Aloysius Jacobus Tinnemans, Arno Jan Bleeker |
2017-07-04 |
| 9696630 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis, Rodolfo Guglielmi Rabe +2 more |
2017-07-04 |
| 9623436 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens |
2017-04-18 |
| 9606448 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2017-03-28 |
| 9606458 |
Method for calibration of an encoder scale and a lithographic apparatus |
Jeroen Dekkers, Andre Bernardus Jeunink, Engelbertus Antonius Fransiscus Van Der Pasch, Michael Jozef Mathijs Renkens, Carolus Johannes Catharina Schoormans +1 more |
2017-03-28 |
| 9594306 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +2 more |
2017-03-14 |
| 9588442 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Johannes Catharinus Hubertus Mulkens +4 more |
2017-03-07 |
| 9581914 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-02-28 |
| 9575416 |
Lithographic apparatus, device manufacturing method and displacement measurement system |
Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Fransiscus Mathijs Jacobs +1 more |
2017-02-21 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |
| 9529269 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans |
2016-12-27 |
| 9523921 |
EUV radiation system and lithographic apparatus |
Antonius Johannes Josephus Van Dijsseldonk |
2016-12-20 |
| 9516732 |
Radiation source |
Christian Wagner |
2016-12-06 |
| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2016-11-01 |
| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hendricus Johannes Maria Meijer +8 more |
2016-11-01 |
| 9482960 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-11-01 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 9442388 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2016-09-13 |
| 9414477 |
Radiation source, lithographic apparatus and device manufacturing method |
Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels |
2016-08-09 |
| 9411250 |
Radiation system and lithographic apparatus |
Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun |
2016-08-09 |
| 9395630 |
Lithographic apparatus and method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-07-19 |