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Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Aschwin Lodewijk Hendricus Johannes Van Meer, Jeroen Johannes Sophia Maria Mertens +20 more |
2019-04-09 |
| 10248034 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2019-04-02 |
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Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Theodorus Marinus Modderman +7 more |
2019-03-05 |
| 10216101 |
Reflector |
Han-Kwang Nienhuys, Sjoerd Nicolaas Lambertus Donders, Gosse Charles De Vries, Michael Jozef Mathijs Renkens |
2019-02-26 |
| 10216093 |
Projection system and minor and radiation source for a lithographic apparatus |
Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal |
2019-02-26 |
| 10191389 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Hendricus Johannes Maria Meijer +9 more |
2019-01-29 |
| 10180629 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Hendricus Johannes Maria Meijer +16 more |
2019-01-15 |
| 10146142 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2018-12-04 |
| 10103508 |
Electron injector and free electron laser |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Gosse Charles De Vries, Olav Waldemar Vladimir Frijns +7 more |
2018-10-16 |
| 10031428 |
Gas flow optimization in reticle stage environment |
Koen Cuypers, Marcelo Henrique De Andrade Oliveira, Marinus Jan Remie, Chattarbir Singh, Laurentius Johannes Adrianus Van Bokhoven +9 more |
2018-07-24 |
| RE46933 |
Dual stage lithographic apparatus and device manufacturing method |
Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop |
2018-07-03 |
| 10001709 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin +2 more |
2018-06-19 |
| 9989844 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2018-06-05 |
| 9986628 |
Method and apparatus for generating radiation |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Andrey Nikipelov, Edgar Alberto Osorio Oliveros, Alexander Matthijs Struycken +2 more |
2018-05-29 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen, Nicolaas Ten Kate +6 more |
2018-05-29 |
| 9958787 |
Lithographic method and apparatus |
Jan Bernard Plechelmus Van Schoot, Timotheus Franciscus Sengers, Christiaan Louis Valentin, Antonius Johannes Josephus Van Dijsseldonk |
2018-05-01 |
| 9952513 |
Undulator |
Andrey Nikipelov, Johannes Antonius Gerardus Akkermans, Leonardus Adrianus Gerardus Grimminck, Michael Jozef Mathijs Renkens, Adrian Toma +1 more |
2018-04-24 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2018-04-24 |
| 9933707 |
Optical apparatus for use in photolithography |
Yim-Bun Patrick Kwan |
2018-04-03 |
| 9910368 |
Patterning device manipulating system and lithographic apparatuses |
Christiaan Louis Valentin, Christopher Charles Ward, Daniel Nathan Burbank, Mark Josef Schuster, Peter James Graffeo |
2018-03-06 |
| 9885965 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Johannes Catharinus Hubertus Mulkens +4 more |
2018-02-06 |
| 9853412 |
Radiation source |
Andrey Nikipelov, Teis Johan Coenen, Wouter Joep ENGELEN, Gerrit Jacobus Hendrik Brussaard, Gijsbertus Geert Poorter |
2017-12-26 |
| 9823572 |
Lithographic method |
Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Gosse Charles De Vries, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager +8 more |
2017-11-21 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2017-10-24 |
| 9753381 |
Substrate table system, lithographic apparatus and substrate table swapping method |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam, Hans Butler |
2017-09-05 |