| 9091944 |
Source collector, lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Gerardus Hubertus Petrus Maria Swinkels, Sven Pekelder, Dzmitry Labetski, Uwe Stamm +1 more |
2015-07-28 |
| 9091940 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Joeri Lof, Theodorus Marinus Modderman +7 more |
2015-07-28 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-07-14 |
| RE45576 |
Dual stage lithographic apparatus and device manufacturing method |
Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop |
2015-06-23 |
| 9057967 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Hendricus Johannes Maria Meijer +9 more |
2015-06-16 |
| 9025127 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-05-05 |
| 9013679 |
Collector mirror assembly and method for producing extreme ultraviolet radiation |
Dzmitry Labetski, Antonius Theodorus Wilhelmus Kempen |
2015-04-21 |
| 8982359 |
System for detecting motion, lithographic apparatus and device manufacturing method |
Jan Van Eijk, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen |
2015-03-17 |
| 8975599 |
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus |
Frank Staals, Joeri Lof, Wim Tjibbo Tel, Bearrach Moest |
2015-03-10 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2015-02-24 |
| 8953144 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-02-10 |
| 8946661 |
Radiation source, lithographic apparatus and device manufacturing method |
Gerardus Hubertus Petrus Maria Swinkels, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors |
2015-02-03 |
| 8947641 |
Lithographic apparatus and method |
Johannes Onvlee |
2015-02-03 |
| 8922749 |
Lithographic apparatus and patterning device |
Hans Butler |
2014-12-30 |
| 8917380 |
Lithographic apparatus and method |
Sven Pekelder, Han-Kwang Nienhuys |
2014-12-23 |
| 8913225 |
Lithographic apparatus and device manufacturing method |
Tammo Uitterdijk, Laurens Anthony Sanderse |
2014-12-16 |
| 8901521 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more |
2014-12-02 |
| 8896809 |
Lithographic apparatus and device manufacturing method |
Judocus Marie Dominicus Stoeldraijer, Jan Bernard Plechelmus Van Schoot, Diederik Jan Maas |
2014-11-25 |
| 8866111 |
Radiation source and method for lithographic apparatus and device manufacturing method |
Johan Frederik Dijksman |
2014-10-21 |
| 8860923 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2014-10-14 |
| 8860922 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Bernhard Gellrich, Andreas Wurmbrand |
2014-10-14 |
| 8836913 |
Lithographic apparatus having an encoder type position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens +1 more |
2014-09-16 |
| 8817229 |
Method of cooling an optical element, lithographic apparatus and method for manufacturing a device |
Franciscus Johannes Joseph Janssen |
2014-08-26 |
| 8810771 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Bernhard Gellrich, Andreas Wurmbrand |
2014-08-19 |
| 8804097 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2014-08-12 |