| 8208120 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Theodorus Marinus Modderman +8 more |
2012-06-26 |
| 8208124 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2012-06-26 |
| 8208123 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Hendricus Johannes Maria Meijer, Uwe Mickan +3 more |
2012-06-26 |
| 8203693 |
Liquid immersion lithography system comprising a tilted showerhead relative to a substrate |
Aleksandr Khmelichek, Harry Sewell, Louis John Markoya, Nicolaas Ten Kate |
2012-06-19 |
| 8203694 |
Lithographic apparatus, projection assembly and active damping |
Marc Wilhelmus Maria Van Der Wijst, Cornelius Adrianus Lambertus De Hoon |
2012-06-19 |
| 8174671 |
Lithographic projection apparatus and method for controlling a support structure |
Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst |
2012-05-08 |
| 8174674 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Johannes Jacobus Matheus Baselmans, Paul Graupner, Bob Streefkerk |
2012-05-08 |
| 8164737 |
Lithographic apparatus having an active damping subassembly |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker |
2012-04-24 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Hendricus Johannes Maria Meijer +16 more |
2012-04-10 |
| 8102502 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Bernhard Gellrich, Andreas Wurmbrand |
2012-01-24 |
| 8094287 |
Lithographic appararus and method |
Tjarko Adriaan Rudolf Van Empel, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bernhard Gellrich, Bauke Jansen +1 more |
2012-01-10 |
| 8072700 |
Optical apparatus for use in photolithography |
Yim-Bun Patrick Kwan |
2011-12-06 |
| 8013978 |
Lithographic apparatus and device manufacturing method |
Tammo Uitterdijk, Laurens Anthony Sanderse |
2011-09-06 |
| 7999914 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Dominicus Jacobus Petrus Adrianus Franken, Marius Ravensbergen |
2011-08-16 |
| 7999912 |
Lithographic apparatus and sensor calibration method |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens +2 more |
2011-08-16 |
| 7982850 |
Immersion lithographic apparatus and device manufacturing method with gas supply |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Theodorus Marinus Modderman +7 more |
2011-07-19 |
| 7961291 |
Lithographic apparatus and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis |
2011-06-14 |
| 7956982 |
Apparatus for cooling |
Sven Antoin Johan Hol, Angelo Cesar Peter De Klerk, Fransicus Mathijs Jacobs, Mark Scholten |
2011-06-07 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2011-05-03 |
| 7932999 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Johannes Catharinus Hubertus Mulkens +4 more |
2011-04-26 |
| 7924406 |
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels |
Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more |
2011-04-12 |
| 7906059 |
Imprint lithography |
Aleksey Yurievich Kolesnychenko, Helmar Van Santen |
2011-03-15 |
| 7903234 |
Lithographic apparatus, device manufacturing method and computer program product |
Judocus Marie Dominicus Stoeldraijer, Heine Melle Mulder, Timotheus Franciscus Sengers, Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma +1 more |
2011-03-08 |
| 7880901 |
Lithographic apparatus and method for calibrating the same |
Leon Martin Levasier, Rene Oesterholt |
2011-02-01 |
| 7868998 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2011-01-11 |