Issued Patents All Time
Showing 51–75 of 127 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2016-09-06 |
| 9360775 | Method of manufacturing a projection objective and projection objective | Heiko Feldmann, Alexander Epple | 2016-06-07 |
| 9310693 | Method for operating a projection exposure tool and control apparatus | Michael Gerhard, Bernd Doerband | 2016-04-12 |
| 9279969 | Catadioptric projection objective | Alexander Epple, Vladimir Kamenov, Thomas Schicketanz | 2016-03-08 |
| 9274327 | Catadioptric projection objective comprising deflection mirrors and projection exposure method | Thomas Schicketanz | 2016-03-01 |
| 9164396 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Alexander Epple, Norbert Wabra +6 more | 2015-10-20 |
| 9146475 | Projection exposure system and projection exposure method | Paul Graupner, Olaf Conradi, Christoph Zaczek, Wilhelm Ulrich, Helmut Beierl +1 more | 2015-09-29 |
| 9097984 | Microlithography projection objective | Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc +4 more | 2015-08-04 |
| 9086637 | Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system | Bernhard Kneer, Markus Deguenther | 2015-07-21 |
| 9081310 | Optical system of microlithographic projection exposure apparatus and method of correcting wavefront deformation in same | Matthias Exler, Ulrich Loering, Holger Walter | 2015-07-14 |
| 9069263 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Heiko Feldmann, Gerald Richter, Sascha Bleidistel, Andreas Frommeyer +1 more | 2015-06-30 |
| 9046787 | Microlithographic projection exposure apparatus | Alexander Epple, Markus Degünther | 2015-06-02 |
| 8896814 | Catadioptric projection objective comprising deflection mirrors and projection exposure method | Thomas Schicketanz | 2014-11-25 |
| 8891172 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff +5 more | 2014-11-18 |
| 8873137 | Catadioptric projection objective | Alexander Epple, Vladimir Kamenov, Thomas Schicketanz | 2014-10-28 |
| 8854606 | Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system | Hans-Jurgen Mann, Wolfgang Singer, Olaf Dittmann, Michael Totzeck | 2014-10-07 |
| 8767181 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack, Nils Dieckmann +4 more | 2014-07-01 |
| 8659744 | Method for correcting a lithography projection objective, and such a projection objective | Wilhelm Ulrich, Thomas Okon, Norbert Wabra, Boris Bittner, Volker Graeschus | 2014-02-25 |
| 8542342 | Method of manufacturing a miniaturized device | Markus Schwab, Aksel Goehnermeier, Tammo Uitterdijk | 2013-09-24 |
| 8508854 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff +5 more | 2013-08-13 |
| 8446665 | Catadioptric projection objective | Alexander Epple, Vladimir Kamenov, Thomas Schicketanz | 2013-05-21 |
| RE44216 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Heiko Feldmann, Karl-Heinz Schuster, Joern Greif-Wuestenbecker, Thomas Scheruebl +3 more | 2013-05-14 |
| 8436985 | Combination stop for catoptric projection arrangement | Hans-Juergen Mann, Daniel Kraehmer, Aurelian Dodoc | 2013-05-07 |
| 8379188 | Optical system | Ralf Mueller | 2013-02-19 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2012-12-11 |