Issued Patents All Time
Showing 76–100 of 127 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8325322 | Optical correction device | Markus Hauf, Ulrich Schoenhoff, Payam Tayebati, Michael Thier, Tilmann Heil +7 more | 2012-12-04 |
| 8325426 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Heiko Feldmann, Michael Totzeck, Wilfried Clauss, Susanne Beder +2 more | 2012-12-04 |
| 8325323 | Method and system for correcting image changes | Olaf Conradi | 2012-12-04 |
| 8319944 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Alexander Epple, Norbert Wabra +6 more | 2012-11-27 |
| 8310752 | Method of manufacturing a projection objective and projection objective | Heiko Feldmann, Alexander Epple | 2012-11-13 |
| 8305558 | Illumination system for a microlithography projection exposure apparatus | Michael Totzeck | 2012-11-06 |
| 8300211 | Catadioptric projection objective | Alexander Epple, Ralf Mueller | 2012-10-30 |
| 8294991 | Interference systems for microlithgraphic projection exposure systems | Ralf Mueller, Michael Totzeck, Heiko Feldmann, Hans-Jochen Paul | 2012-10-23 |
| 8248578 | Projection exposure method and projection exposure system therefor | Julian Kaller | 2012-08-21 |
| 8237918 | Optical system of a microlithographic projection exposure apparatus | Michael Totzeck, Damian Fiolka | 2012-08-07 |
| 8208127 | Combination stop for catoptric projection arrangement | Hans-Juergen Mann, Daniel Kraehmer, Aurelian Dodoc | 2012-06-26 |
| 8174676 | Method for correcting a lithography projection objective, and such a projection objective | Wilhelm Ulrich, Thomas Okon, Norbert Wabra, Boris Bittner, Volker Graeschus | 2012-05-08 |
| 8159648 | Method and device for the correction of imaging defects | Franz Sorg, Peter Deufel | 2012-04-17 |
| 7982969 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Heiko Feldmann, Michael Totzeck, Wilfried Clauss, Susanne Beder +2 more | 2011-07-19 |
| 7982854 | Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system | Hans-Juergen Mann, Wolfgang Singer, Olaf Dittmann, Michael Totzeck | 2011-07-19 |
| 7961297 | Method for determining intensity distribution in the image plane of a projection exposure arrangement | Joern Greif-Wuestenbecker, Beate Boehme, Ulrich Stroessner, Michael Totzeck, Vladimir Kamenov +3 more | 2011-06-14 |
| 7920275 | Optical system of a microlithographic projection exposure apparatus | Joerge Tschischgale | 2011-04-05 |
| 7847921 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack, Nils Dieckmann +4 more | 2010-12-07 |
| 7808615 | Projection exposure apparatus and method for operating the same | Olaf Conradi, Nils Dieckmann, Markus Schwab, Olaf Dittmann, Michael Totzeck +2 more | 2010-10-05 |
| 7782440 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Alexander Epple, Norbert Wabra +6 more | 2010-08-24 |
| 7777963 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Heiko Feldmann, Gerald Richter, Sascha Bleidistel, Andreas Frommeyer +1 more | 2010-08-17 |
| 7733501 | Optical system of a microlithographic projection exposure apparatus | Joerge Tschischgale | 2010-06-08 |
| 7719658 | Imaging system for a microlithographical projection light system | Andreas Dorsel, Bernhard Kneer, Susanne Beder, Alexander Epple, Norbert Wabra | 2010-05-18 |
| 7672044 | Lens made of a crystalline material | Birgit Enkisch, Hartmut Enkisch | 2010-03-02 |
| 7589903 | Projection objective adapted for use with different immersion fluids or liquids, method of conversion of such and production method | Susanne Beder, Wilhelm Ulrich, Heiko Feldmann, Wolfgang Singer | 2009-09-15 |