| 9207548 |
Radiation source with a debris mitigation system, lithographic apparatus with a debris mitigation system, method for preventing debris from depositing on collector mirror, and device manufacturing method |
Erik Roelof Loopstra, Johannes Hubertus Josephina Moors |
2015-12-08 |
| 9195144 |
Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method |
Martin Jacobus Johan Jak, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer, Andrei Mikhailovich Yakunin |
2015-11-24 |
| 9195150 |
Lithographic apparatus comprising a support for holding an object, and a support for use therein |
Theodorus Petrus Maria Cadee, Koen Jacobus Johannes Maria Zaal, Ramin Badie, Harmeet Singh |
2015-11-24 |
| 9122178 |
Object inspection systems and methods |
Vitalii Ivanov, Arie Jeffrey Den Boef, Luigi Scaccabarozzi, Nikolay Nikolaevich Iosad |
2015-09-01 |
| 9116423 |
Imprint lithography apparatus |
Andre Bernardus Jeunink, Hans Butler, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Yvonne Wendela Kruijt-Stegeman |
2015-08-25 |
| 9110389 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Theodorus Hubertus Josephus Bisschops, Marcel Mathijs Theodore Marie Dierichs, Theodorus Marinus Modderman |
2015-08-18 |
| 9097982 |
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter |
Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels |
2015-08-04 |
| 9091944 |
Source collector, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Sven Pekelder, Dzmitry Labetski, Uwe Stamm +1 more |
2015-07-28 |
| 9082521 |
EUV multilayer mirror with interlayer and lithographic apparatus using the mirror |
Denis Alexandrovich Glushkov, Leonid Aizikovitch Sjmaenok, Nikolay Nikolaevitch Salashchenko, Nikolay Ivanovich Chkhalo |
2015-07-14 |
| 9041912 |
Spectral purity filters for use in a lithographic apparatus |
Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrey Mikhailovich Yakunin, Martin Jacobus Johan Jak |
2015-05-26 |
| 9011978 |
Method and apparatus for treatment of self-assemblable polymer layers for use in lithography |
Roelof Koole, Sander Frederik Wuister, Emiel Peeters |
2015-04-21 |
| 8961801 |
Imprint lithography method and apparatus |
Sander Frederik Wuister, Johan Frederik Dijksman, Yvonne Wendela Kruijt-Stegeman, Jeroen Herman Lammers, Roelof Koole |
2015-02-24 |
| 8946661 |
Radiation source, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Johannes Hubertus Josephina Moors |
2015-02-03 |
| 8901521 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more |
2014-12-02 |
| 8830455 |
Inspection method and apparatus |
Arie Jeffrey Den Boef, Sander Frederik Wuister, Luigi Scaccabarozzi |
2014-09-09 |
| 8755032 |
Radiation source and lithographic apparatus |
Andrei Mikhailovich Yakunin, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Vladimir Mihailovitch Krivtsun, Gerardus Hubertus Petrus Maria Swinkels +1 more |
2014-06-17 |
| 8742381 |
Radiation source with cleaning apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer, Martin Jacobus Johan Jak |
2014-06-03 |
| 8685632 |
Radiation source, lithographic apparatus and device manufacturing method |
Antonius Theodorus Wilhelmus Kempen, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra |
2014-04-01 |
| 8610089 |
Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method |
Sjoerd Nicolaas Lambertus Donders, Johannes Hubertus Josephina Moors, Martinus Cornelis Maria Verhagen, Olav Waldemar Vladimir Frijns, Gerrit Van Donk +1 more |
2013-12-17 |
| 8598550 |
Ex-situ removal of deposition on an optical element |
Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken +4 more |
2013-12-03 |
| 8529823 |
Imprint lithography |
Arie Jeffrey Den Boef, Andre Bernardus Jeunink, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman |
2013-09-10 |
| 8531648 |
Lithographic apparatus, programmable patterning device and lithographic method |
Pieter Willem Herman De Jager, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Johannes Onvlee, Erwin John Van Zwet |
2013-09-10 |
| 8507882 |
Radiation source and lithographic apparatus |
Gerardus Hubertus Petrus Maria Swinkels, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors |
2013-08-13 |
| 8493548 |
Lithographic apparatus and device manufacturing method |
Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Vladimir Mihailovitch Krivtsun |
2013-07-23 |
| 8454849 |
Imprint lithography |
Sander Frederik Wuister, Arie Jeffrey Den Boef, Yvonne Wendela Kruijt-Stegeman, Tatyana Viktorovna Rakhimova, Dmitriy Viktorovich Lopaev +3 more |
2013-06-04 |
