Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9041912 | Spectral purity filters for use in a lithographic apparatus | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Martin Jacobus Johan Jak | 2015-05-26 |
| 8390788 | Spectral purity filters for use in a lithographic apparatus | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Martin Jacobus Johan Jak | 2013-03-05 |