| 7935218 |
Optical apparatus, lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Carolus Ida Maria Antonius Spee, Rik Jansen |
2011-05-03 |
| 7928412 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more |
2011-04-19 |
| 7897110 |
System and method for detecting at least one contamination species in a lithographic apparatus |
Levinus Pieter Bakker, Ralph Kurt, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Peter Cornelis Zalm |
2011-03-01 |
| 7889312 |
Apparatus comprising a rotating contaminant trap |
Johannes Christiaan Leonardus Franken, Arnoud Cornelis Wassink |
2011-02-15 |
| 7875863 |
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Mandeep Singh, Harm-Jan Voorma, Derk Jan Wilfred Klunder |
2011-01-25 |
| 7872244 |
Lithographic apparatus and device manufacturing method |
Vladimir Vitalevich Ivanov, Arno Jan Bleeker, Konstantin Nikolaevich Koshelev, Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun +1 more |
2011-01-18 |
| 7868304 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Johannes Christiaan Leonardus Franken, Arnoud Cornelis Wassink +1 more |
2011-01-11 |
| 7863591 |
Radiation system and lithographic apparatus comprising the same |
Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more |
2011-01-04 |
| 7838853 |
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method |
Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev |
2010-11-23 |
| 7825390 |
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus |
Vladimir Mihallovitch Krivtsun, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev, Yurii Victorovitch Sidelnikov +1 more |
2010-11-02 |
| 7812330 |
Radical cleaning arrangement for a lithographic apparatus |
Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen |
2010-10-12 |
| 7800079 |
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method |
Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Yurii Victorvitch Sidelnikov, Marcel Mathijs Theodore Marie Dierichs +1 more |
2010-09-21 |
| 7771896 |
Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method |
Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen |
2010-08-10 |
| 7772570 |
Assembly for blocking a beam of radiation and method of blocking a beam of radiation |
Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Vladimir Mihailovitch Krivtsun |
2010-08-10 |
| 7767989 |
Ex-situ removal of deposition on an optical element |
Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Harm-Jan Voorma, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more |
2010-08-03 |
| 7763871 |
Radiation source |
Vladimir Vitalevich Ivanov |
2010-07-27 |
| 7750326 |
Lithographic apparatus and cleaning method therefor |
Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder |
2010-07-06 |
| 7736820 |
Anti-reflection coating for an EUV mask |
Maarten Marinus Johannes Wilhelmus Van Herpen, Koen Van Ingen Schenau, Derk Jan Wilfred Klunder |
2010-06-15 |
| 7724349 |
Device arranged to measure a quantity relating to radiation and lithographic apparatus |
Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Niels Machiel Driessen, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more |
2010-05-25 |
| 7706057 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker, Derk Jan Wilfred Klunder |
2010-04-27 |
| 7696492 |
Radiation system and lithographic apparatus |
Arnoud Cornelis Wassink, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Theodorus Petrus Maria Cadee, Vladimir Mihailovitch Krivtsun +4 more |
2010-04-13 |
| 7696493 |
Radiation system and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Derk Jan Wilfred Klunder |
2010-04-13 |
| 7684012 |
Lithographic device, device manufacturing method and device manufactured thereby |
Johannes Henricus Wilhelmus Jacobs, Barrie Dudley Brewster, Vladimir Vitalevitch Ivanov, Bastiaan Mertens, Johannes Hubertus Josephina Moors +2 more |
2010-03-23 |
| 7684008 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Theodorus Hubertus Josephus Bisschops, Marcel Mathijs Theodore Marie Dierichs, Theodorus Marinus Modderman |
2010-03-23 |
| 7671965 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Jeroen Jonkers |
2010-03-02 |
