Issued Patents All Time
Showing 151–175 of 193 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7433033 | Inspection method and apparatus using same | Arno Jan Bleeker, Johannes Onvlee, Jacques Cor Johan Van Der Donck, Michiel Peter Oderwald | 2008-10-07 |
| 7414700 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Derk Jan Wilfred Klunder | 2008-08-19 |
| 7405417 | Lithographic apparatus having a monitoring device for detecting contamination | Lucas Henricus Johannes Stevens, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn | 2008-07-29 |
| 7397056 | Lithographic apparatus, contaminant trap, and device manufacturing method | Leonid Aizikovitch Sjmaenok, Josephus Jacobus Smits, Lambertus Adrianus Van De Wildenberg, Alexander Schmidt, Arnoud Cornelis Wassink +2 more | 2008-07-08 |
| 7372623 | Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Johannes Hubertus Josephina Moors, Leonid Shmaenok, Nikolay Nikolaevitch Salashchenko | 2008-05-13 |
| 7372058 | Ex-situ removal of deposition on an optical element | Lambertus Adrianus Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken, Johannes Bernardus Ridder, Vladimir Vitalevitch Ivanov +1 more | 2008-05-13 |
| 7361911 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Robertus Nicodemus Jacobus Van Ballegoij, Gert-Jan Heerens, Frederik T. E. Heuts, Johannes Henricus Wilhelmus Jacobs +2 more | 2008-04-22 |
| 7355672 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Derk Jan Wilfred Klunder | 2008-04-08 |
| 7336416 | Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker, Derk Jan Wilfred Klunder | 2008-02-26 |
| 7317504 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman, Marcel Mathijs Theodore Marie Dierichs | 2008-01-08 |
| 7307263 | Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap | Levinus Pieter Bakker, Cornelis Petrus Luijkx, Frank Jeroen Pieter Schuurmans | 2007-12-11 |
| 7279690 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Bastiaan Mertens, Johannes Hubertus Josephina Moors +4 more | 2007-10-09 |
| 7251012 | Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris | Levinus Pieter Bakker, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Givi Georgievitch Zukavishvili, Abraham Veefkind | 2007-07-31 |
| 7233010 | Radiation system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Arnoud Cornelis Wassink, Derk Jan Wilfred Klunder | 2007-06-19 |
| 7193229 | Lithographic apparatus, illumination system and method for mitigating debris particles | Levinus Pieter Bakker, Aleksey Yurievich Kolesnychenko, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans | 2007-03-20 |
| 7170586 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Jeroen Jonkers, Erik Roelof Loopstra | 2007-01-30 |
| 7167232 | Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus | Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans, Lucas Henricus Johannes Stevens | 2007-01-23 |
| 7161653 | Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus | Levinus Pieter Bakker, Arnoud Cornelis Wassink | 2007-01-09 |
| 7135692 | Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation | Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev | 2006-11-14 |
| 7106832 | Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation source | Derk Jan Wilfred Klunder, Levinus Pieter Bakker, Maarten Marinus Johannes Wilhelmus Van Herpen | 2006-09-12 |
| 7075620 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more | 2006-07-11 |
| 7061574 | Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vladimir Mihailovitch Krivtsun | 2006-06-13 |
| 7057190 | Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2006-06-06 |
| 7034308 | Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby | Levinus Pieter Bakker, Ralph Kurt, Frank Jeroen Pieter Schuurmans, Yurii Victorovitch Sidelnikov | 2006-04-25 |
| 7030963 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Jeroen Jonkers, Erik Roelof Loopstra | 2006-04-18 |