| 7639418 |
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby |
Johannes Hubertus Josephina Moors, Leonid Shmaenok, Nikolay Nikolaevitch Salashchenko |
2009-12-29 |
| 7629594 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more |
2009-12-08 |
| 7629593 |
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method |
Edwin Johan Buis, Tjarko Adriaan Rudolf Van Empel, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer |
2009-12-08 |
| 7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Leonid Aizikovitch Sjmaenok, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Alexander Schmidt, Arnoud Cornelis Wassink +3 more |
2009-11-03 |
| 7598503 |
Lithographic apparatus and cleaning method therefor |
Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder, Johannes Hubertus Josephina Moors |
2009-10-06 |
| 7557366 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vladimir Vitalevitch Ivanov, Vladimir Mihailovitch Krivtsun |
2009-07-07 |
| 7541603 |
Radiation system and lithographic apparatus comprising the same |
Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more |
2009-06-02 |
| 7528395 |
Radiation source, lithographic apparatus and device manufacturing method |
Konstantin Nikolaevitch Koshelev, Vladimir Vital'evitch Ivanov, Erik René Kieft, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens +5 more |
2009-05-05 |
| 7518135 |
Reducing fast ions in a plasma radiation source |
Vladimir Ivanov, Konstantin Nikolaevich Koshelev |
2009-04-14 |
| 7518134 |
Plasma radiation source for a lithographic apparatus |
Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vladimir Mihailovitch Krivtsun |
2009-04-14 |
| 7515245 |
Lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors |
2009-04-07 |
| 7508487 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen, Willem Van Schaik, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors +1 more |
2009-03-24 |
| 7504643 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Johannes Maria Freriks, Vladimir Vitalevitch Ivanov, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen |
2009-03-17 |
| 7501642 |
Radiation source |
Johannes Hubertus Josephina Moors, Johannes Christiaan Leonardus Franken, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Alexander Matthijs Struycken |
2009-03-10 |
| 7495239 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Johannes Maria Freriks, Vladimir Vitalevitch Ivanov |
2009-02-24 |
| 7491951 |
Lithographic apparatus, system and device manufacturing method |
Marc Hubertus Lorenz Van Der Velden, Bastiaan Mertens, Johannes Hubertus Josephina Moors, Markus Weiss, Bastiaan Theodoor Wolschrijn +1 more |
2009-02-17 |
| 7489385 |
Lithographic projection apparatus with collector including concave and convex mirrors |
— |
2009-02-10 |
| 7473907 |
Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination |
Wolfgang Singer, Martin Antoni, Johannes Wangler, Markus Weiss, Marcel Mathijs Theodore Marie Dierichs +5 more |
2009-01-06 |
| 7473908 |
Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface |
Maarten Marinus Johannes Wilhelmus Van Herpen, Johannes Hubertus Josephina Moors, Wouter Anton Soer |
2009-01-06 |
| 7468521 |
Lithographic apparatus and device manufacturing method |
Derk Jan Wilfred Klunder, Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans, Dominik Marcel Vaudrevange, Maarten Marinus Johannes Wilhelmus Van Herpen |
2008-12-23 |
| 7465943 |
Controlling the flow through the collector during cleaning |
Sonia Margart Skelly, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen |
2008-12-16 |
| 7463413 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker, Derk Jan Wilfred Klunder |
2008-12-09 |
| 7462851 |
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsun |
2008-12-09 |
| 7462850 |
Radical cleaning arrangement for a lithographic apparatus |
Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen |
2008-12-09 |
| 7459690 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more |
2008-12-02 |
