Issued Patents All Time
Showing 176–193 of 193 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7030958 | Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method | Cornelis Petrus Luijkx, Hako Botma, Martinus Van Duijnhoven, Markus Franciscus Antonius Eurlings, Heine Melle Mulder +3 more | 2006-04-18 |
| 6992754 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2006-01-31 |
| 6933510 | Radiation source, lithographic apparatus, and device manufacturing method | Givi Georgievitch Zukavishvili, Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev, Evgenil Korob, Pavel Stanislavovich Antsiferov | 2005-08-23 |
| 6930760 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Martinus Hendrikus Antonius Leenders, Hugo Matthieu Visser, Levinus Pieter Bakker | 2005-08-16 |
| 6927403 | Illumination system that suppresses debris from a light source | Wolfgang Singer, Martin Antoni, Johannes Wangler, Wilhelm Egle, Erik Roelof Loopstra | 2005-08-09 |
| 6864958 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2005-03-08 |
| 6862075 | Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby | Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev | 2005-03-01 |
| 6838684 | Lithographic projection apparatus and particle barrier for use therein | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2005-01-04 |
| 6836530 | Illumination system with a plurality of individual gratings | Wolfgang Singer, Markus Weiss, Bernd Kleemann, Karlfried Osterried, Johannes Wangler +2 more | 2004-12-28 |
| 6781673 | Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby | Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser, Gerrit-Jan Heerens +4 more | 2004-08-24 |
| 6721389 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more | 2004-04-13 |
| 6714279 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Jeroen Jonkers | 2004-03-30 |
| 6678037 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Martinus Hendrikus Antonius Leenders, Hugo Matthieu Visser, Levinus Pieter Bakker | 2004-01-13 |
| 6614505 | Lithographic projection apparatus, device manufacturing method, and device manufactured thereby | Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev | 2003-09-02 |
| 6597431 | Lithographic projection apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Oscar Fransiscus Jozephus Noordman, Michael J. M. Renkens, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +1 more | 2003-07-22 |
| 6576912 | Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window | Hugo Matthieu Visser, Richard L. Sandstrom, Theodorus Hubertus Josephus Bisschops, Jeroen Jonkers | 2003-06-10 |
| 6456362 | Integrating waveguide for use in lithographic projection apparatus | — | 2002-09-24 |
| 6452194 | Radiation source for use in lithographic projection apparatus | Frederik Bijkerk, Henryk Fiedorowicz, Cornelis Cornelia De Bruijn, Andrzej Bartnik, Konstantin Nikolaevitch Koshelev | 2002-09-17 |