Issued Patents All Time
Showing 76–100 of 193 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8445873 | System and method for detecting at least one contamination species in a lithographic apparatus | Levinus Pieter Bakker, Ralph Kurt, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Peter Cornelis Zalm | 2013-05-21 |
| 8431916 | Radiation source and lithographic apparatus | Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman | 2013-04-30 |
| 8416391 | Radiation source, lithographic apparatus and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer | 2013-04-09 |
| 8405825 | Method of detecting a particle and a lithographic apparatus | Luigi Scaccabarozzi, Christian Wagner | 2013-03-26 |
| 8405055 | Source module, radiation source and lithographic apparatus | Dzmitry Labetski, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels | 2013-03-26 |
| 8405051 | Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer, Martin Jacobus Johan Jak | 2013-03-26 |
| 8390788 | Spectral purity filters for use in a lithographic apparatus | Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrey Mikhailovich Yakunin, Martin Jacobus Johan Jak | 2013-03-05 |
| 8373846 | Radiation source, lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Johannes Josephina Moors | 2013-02-12 |
| 8362444 | Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method | Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev | 2013-01-29 |
| 8363208 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman, Marcel Mathijs Theodore Marie Dierichs | 2013-01-29 |
| 8345223 | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby | Wouter Anthon Soer, Johannes Hubertus Josephina Moors, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrei Mikhailovich Yakunin | 2013-01-01 |
| 8319200 | Radiation source, lithographic apparatus and device manufacturing method | Hendrikus Gijsbertus Schimmel, Erik Roelof Loopstra, Karel Joop BOSSCHAART | 2012-11-27 |
| 8317929 | Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus | Tatyana Victorovna Rakhimova, Vladimir Vitalevich Ivanov, Konstantin Nikolaevitch Koshelev, Johannes Hubertus Josephina Moors, Aleksander Sergeevich Kovalev +1 more | 2012-11-27 |
| 8294128 | Apparatus with plasma radiation source and method of forming a beam of radiation | Vladimir Mihailovitch Krivtsun, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev, Yurii Victorovitch Sidelnikov +1 more | 2012-10-23 |
| 8279397 | Method for removing contamination on optical surfaces and optical arrangement | Dirk Heinrich Ehm, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Vladimir Vitalevitsch Ivanov | 2012-10-02 |
| 8242473 | Radiation source | Vladimir Vitalevich Ivanov | 2012-08-14 |
| 8242471 | Radiation source and lithographic apparatus including a contamination trap | Wouter Anthon Soer, Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Maarten Marinus Johannes Wilhelmus Van Herpen | 2012-08-14 |
| 8232537 | Radiation source, lithographic apparatus and device manufacturing method | Hendrikus Gijsbertus Schimmel, Erik Roelof Loopstra | 2012-07-31 |
| 8217347 | System and method for detecting at least one contamination species in a lithographic apparatus | Levinus Pieter Bakker, Ralph Kurt, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Peter Cornelis Zalm | 2012-07-10 |
| 8139200 | Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker, Derk Jan Wilfred Klunder | 2012-03-20 |
| 8134136 | Ex-situ removal of deposition on an optical element | Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken +4 more | 2012-03-13 |
| 8094288 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors | 2012-01-10 |
| 8031404 | Fly's eye integrator, illuminator, lithographic apparatus and method | — | 2011-10-04 |
| 8018574 | Lithographic apparatus, radiation system and device manufacturing method | Robert Rafilevitch Gayazov, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili +1 more | 2011-09-13 |
| 8018578 | Pellicle, lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2011-09-13 |