| 9823572 |
Lithographic method |
Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Gosse Charles De Vries, Erik Roelof Loopstra, Pieter Willem Herman De Jager +8 more |
2017-11-21 |
| 9728931 |
Electron injector and free electron laser |
Andrey Nikipelov, Pieter Willem Herman De Jager, Gosse Charles De Vries, Olav Waldemar Vladimir Frijns, Leonardus Adrianus Gerardus Grimminck +7 more |
2017-08-08 |
| 9726989 |
Spectral purity filter |
Wouter Anthon Soer, Erik Roelof Loopstra, Andrei Mikhailovich Yakunin, Martin Jacobus Johan Jak |
2017-08-08 |
| 9645502 |
Lithographic apparatus, programmable patterning device and lithographic method |
Pieter Willem Herman De Jager, Johannes Onvlee, Lucas Henricus Johannes Stevens, Sander Frederik Wuister, Nikolay Nikolaevich Iosad |
2017-05-09 |
| 9632419 |
Radiation source |
Jan Bernard Plechelmus Van Schoot, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors, Uwe Stamm +3 more |
2017-04-25 |
| 9606445 |
Lithographic apparatus and method of manufacturing a device |
Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi, Hans Joerg Mallmann +8 more |
2017-03-28 |
| 9594306 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +2 more |
2017-03-14 |
| 9529283 |
Radiation source, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Johannes Hubertus Josephina Moors, Leonid Aizikovitch Sjmaenok |
2016-12-27 |
| 9513553 |
Methods of providing patterned epitaxy templates for self-assemblable block copolymers for use in device lithography |
Sander Frederik Wuister, Jozef Maria Finders, Roelof Koole, Emiel Peeters, Harmeet Singh |
2016-12-06 |
| 9488922 |
Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices |
Yuri Vainer, Luigi Scaccabarozzi, Arie Jeffrey Den Boef |
2016-11-08 |
| 9482960 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-11-01 |
| 9442380 |
Method and apparatus for generating radiation |
Ramin Badie, Johan Frederik Dijksman, Antonius Theodorus Wilhelmus Kempen, Andrei Mikhailovich Yakunin, Hendrikus Robertus Marie Van Greevenbroek +1 more |
2016-09-13 |
| 9411250 |
Radiation system and lithographic apparatus |
Erik Roelof Loopstra, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun |
2016-08-09 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen, Olav Waldemar Vladimir Frijns +5 more |
2016-08-09 |
| 9395630 |
Lithographic apparatus and method |
Andrei Mikhailovich Yakunin, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-07-19 |
| 9377695 |
Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device |
Andrei Mikhailovich Yakunin, Olav Waldemar Vladimir Frijns |
2016-06-28 |
| 9372399 |
Imprint lithography method and imprintable medium |
Martinus Bernardus Van Der Mark, Andre Bernardus Jeunink, Johan Frederik Dijksman, Sander Frederik Wuister, Emiel Peeters +5 more |
2016-06-21 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more |
2016-06-07 |
| 9354529 |
Arrangement for use in a projection exposure tool for microlithography having a reflective optical element |
Dirk Heinrich Ehm, Maarten Van Kampen, Stefan Schmidt, Erik Roelof Loopstra |
2016-05-31 |
| 9335638 |
Lithographic apparatus, programmable patterning device and lithographic method |
Pieter Willem Herman De Jager, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Johannes Onvlee, Erwin John Van Zwet |
2016-05-10 |
| 9307624 |
Lithographic apparatus |
Denis Alexandrovich Glushkov, Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Givi Georgievich Zukakishvili, Vladimir Mihailovitch Krivtsun +3 more |
2016-04-05 |
| 9298110 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device |
Jens Arno Steinhoff, Richard Joseph Bruls, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof, Adrianus Johannes Maria Van Dijk +2 more |
2016-03-29 |
| 9285690 |
Mirror, lithographic apparatus and device manufacturing method |
Leonid Aizikovitch Sjmaenok, Andrei Mikhailovich Yakunin |
2016-03-15 |
| 9278466 |
Imprint lithography method and apparatus |
Sander Frederik Wuister, Johan Frederik Dijksman, Yvonne Wendela Kruijt-Stegeman, Jeroen Herman Lammers, Roelof Koole |
2016-03-08 |
| 9229324 |
Methods of providing patterned templates for self-assemblable block copolymers for use in device lithography |
Harmeet Singh, Jozef Maria Finders, Sander Frederik Wuister, Roelof Koole, Emiel Peeters |
2016-01-05 |
