Issued Patents All Time
Showing 26–50 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393665 | Physical vapor deposition (PVD) chamber with reduced arcing | Chao Du, Yong Cao, Chen Gong, Mingdong Li, Fuhong Zhang +1 more | 2022-07-19 |
| 11313034 | Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor deposition | Weimin Zeng, Yong Cao, Daniel Lee Diehl, Huixiong Dai, Khoi A. Phan +2 more | 2022-04-26 |
| 11315771 | Methods and apparatus for processing a substrate | Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Martin Lee Riker, Lewis Yuan Tse Lo +2 more | 2022-04-26 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Adolph Miller Allen +1 more | 2022-03-29 |
| 11270911 | Doping of metal barrier layers | Lu Chen, Christina L. Engler, Gang Shen, Feng Chen, Tae Hong Ha | 2022-03-08 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Kishor Kalathiparambil +1 more | 2022-01-11 |
| 11171045 | Deposition of metal films with tungsten liner | Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha +1 more | 2021-11-09 |
| 11114320 | Processing system and method of forming a contact | Gaurav Thareja, Takashi Kuratomi, Avgerinos V. Gelatos, Sanjay Natarajan, Keyvan Kashefizadeh +3 more | 2021-09-07 |
| 11056325 | Methods and apparatus for substrate edge uniformity | Thanh X. Nguyen, Alexander Jansen, Yana Cheng, Randal Dean Schmieding, Yong Cao +1 more | 2021-07-06 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2021-06-15 |
| 11011676 | PVD buffer layers for LED fabrication | Mingwei Zhu, Rongjun Wang, Nag B. Patibandla, Vivek Agrawal, Cheng-Hsiung Tsai +5 more | 2021-05-18 |
| 10950448 | Film quality control in a linear scan physical vapor deposition process | Bencherki Mebarki, Joung Joo Lee | 2021-03-16 |
| 10927451 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Byeong-Chan Lee, Huixiong Dai, Tejinder Singh, Joung Joo Lee | 2021-02-23 |
| 10927450 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Wenhui Wang, Huixiong Dai, Christopher S. Ngai, Joung Joo Lee | 2021-02-23 |
| 10815561 | Method and apparatus for asymmetric selective physical vapor deposition | Joung Joo Lee, Bencherki Mebarki, Keith A. Miller, Sree Rangasai V. Kesapragada, Sudarsan Srinivasan | 2020-10-27 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| 10734235 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Jothilingam Ramalingam, Thanh X. Nguyen, Zhiyong Wang, Jianxin Lei | 2020-08-04 |
| 10718049 | Process kit shield for improved particle reduction | Muhammad M. Rasheed, Rongjun Wang, Zhendong Liu, Xinyu Fu | 2020-07-21 |
| 10714388 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Sang-Hyeob Lee, Thomas Jongwan Kwon, Jaesoo Ahn +2 more | 2020-07-14 |
| 10707122 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik +6 more | 2020-07-07 |
| 10636655 | Methods for asymmetric deposition of metal on high aspect ratio nanostructures | Ben-Li Sheu, Bencherki Mebarki, Joung Joo Lee, Ismail Emesh, Roey Shaviv | 2020-04-28 |
| 10563304 | Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers | Xiangjin Xie, Adolph Miller Allen, Goichi Yoshidome | 2020-02-18 |
| 10431440 | Methods and apparatus for processing a substrate | Rongjun Wang, Anantha K. Subramani, Chi Hong Ching | 2019-10-01 |
| 10388532 | Methods and devices using PVD ruthenium | Jothilingam Ramalingam, Ross Marshall, Jianxin Lei | 2019-08-20 |
| 10354882 | Low thermal budget crystallization of amorphous metal silicides | Bencherki Mebarki, Sundar Ramamurthy, Jerome Machillot | 2019-07-16 |