Issued Patents All Time
Showing 126–150 of 196 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943127 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Chen-An Chen +2 more | 2005-09-13 |
| 6936551 | Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices | Farhad Moghadam, Jun Zhao, Timothy Weidman, Rick J. Roberts, Alexandros T. Demos | 2005-08-30 |
| 6936309 | Hardness improvement of silicon carboxy films | Lihua Li, Tzu-Fang Huang, Ellie Yieh | 2005-08-30 |
| 6921727 | Method for modifying dielectric characteristics of dielectric layers | Kang-Lie Chiang, Mahmoud Dahimene, Xiaoye Zhao, Yan Ye, Gerardo Delgadino +2 more | 2005-07-26 |
| 6913992 | Method of modifying interlayer adhesion | Francimar Schmitt, Son V. Nguyen, Shankar Venkataraman | 2005-07-05 |
| 6914014 | Method for curing low dielectric constant film using direct current bias | Lihua Li, Tzu-Fang Huang, Juan Carlos Rocha-Alvarez, Maosheng Zhao | 2005-07-05 |
| 6911403 | Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics | Lihua Li, Tsutomu Tanaka, Tzu-Fang Huang, Dian Sugiarto, Visweswaren Sivaramakrishnan +2 more | 2005-06-28 |
| 6899763 | Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes | Himansu Pokharna, Tian-Hoe Lim | 2005-05-31 |
| 6890850 | Method of depositing dielectric materials in damascene applications | Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Fei Han, Ellie Yieh +5 more | 2005-05-10 |
| 6878620 | Side wall passivation films for damascene cu/low k electronic devices | Son V. Nguyen, Srinivas D. Nemani | 2005-04-12 |
| 6858923 | Post-deposition treatment to enhance properties of Si-O-C low films | Frederic Gaillard, Ellie Yieh, Tian-Hoe Lim | 2005-02-22 |
| 6849562 | Method of depositing a low k dielectric barrier film for copper damascene application | Chi-I Lang, Ping Xu, Louis Yang | 2005-02-01 |
| 6838393 | Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Chi-I Lang, Peter Wai-Man Lee | 2005-01-04 |
| 6815373 | Use of cyclic siloxanes for hardness improvement of low k dielectric films | Vinita Singh, Srinivas D. Nemani, Yi Zheng, Lihua Li, Tzu-Fang Huang +1 more | 2004-11-09 |
| 6806207 | Method of depositing low K films | Tzu-Fang Huang, Yung-Cheng Lu, Ellie Yieh, Wai-Fan Yau, David Cheung +5 more | 2004-10-19 |
| 6797643 | Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power | Juan Carlos Rocha-Alvarez, Maosheng Zhao, Ying Yu, Shankar Venkataraman, Srinivas D. Nemani | 2004-09-28 |
| 6790788 | Method of improving stability in low k barrier layers | Lihua Li, Tzu-Fang Huang | 2004-09-14 |
| 6784119 | Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition | Frederic Gaillard, Tian-Hoe Lim, Ellie Yieh, Wai-Fan Yau, Shin-Puu Jeng +2 more | 2004-08-31 |
| 6777171 | Fluorine-containing layers for damascene structures | Ping Xu, Jia-Sheng Lee, Ishing Lou | 2004-08-17 |
| 6764958 | Method of depositing dielectric films | Srinivas D. Nemani, Dian Sugiarto, Ellie Yieh, Ping Xu, Francimar Campana-Schmitt +1 more | 2004-07-20 |
| 6759327 | Method of depositing low k barrier layers | Ping Xu, Louis Yang | 2004-07-06 |
| 6753258 | Integration scheme for dual damascene structure | Frederic Gaillard, Ellie Yieh, Paul Fisher, Margaret Gotuaco | 2004-06-22 |
| 6750141 | Silicon carbide cap layers for low dielectric constant silicon oxide layers | Paul Fisher, Margaret Gotuaco, Frederic Gaillard, Ellie Yieh | 2004-06-15 |
| 6699784 | Method for depositing a low k dielectric film (K>3.5) for hard mask application | Ping Xu, Louis Yang, Tzu-Fang Huang, Wen Zhu | 2004-03-02 |
| 6680164 | Solvent free photoresist strip and residue removal processing for post etching of low-k films | Huong Nguyen, Mark Kawaguchi, Mehul Naik, Ellie Yieh | 2004-01-20 |