Issued Patents All Time
Showing 176–196 of 196 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465372 | Surface treatment of C-doped SiO2 film to enhance film stability during O2 ashing | Tian-Hoe Lim, Frederic Gaillard, Ellie Yieh | 2002-10-15 |
| 6426015 | Method of reducing undesired etching of insulation due to elevated boron concentrations | Francimar Campana, Ellie Yieh | 2002-07-30 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, David Cheung, Ellie Yieh, Wai-Fan Yau, Chi-I Lang +4 more | 2002-07-02 |
| 6360685 | Sub-atmospheric chemical vapor deposition system with dopant bypass | Ellie Yieh | 2002-03-26 |
| 6352591 | Methods and apparatus for shallow trench isolation | Ellie Yieh, Srinivas D. Nemani | 2002-03-05 |
| 6347636 | Methods and apparatus for gettering fluorine from chamber material surfaces | Visweswaren Sivaramakrishnan, Srinivas D. Nemani, Ellie Yieh, Gary Fong | 2002-02-19 |
| 6348099 | Methods and apparatus for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions | Ellie Yieh, Srinivas D. Nemani | 2002-02-19 |
| 6277200 | Dielectric film deposition employing a bistertiarybutylaminesilane precursor | Ellie Yieh | 2001-08-21 |
| 6261975 | Method for depositing and planarizing fluorinated BPSG films | Francimar Campana, Ellie Yieh | 2001-07-17 |
| 6258735 | Method for using bypass lines to stabilize gas flow and maintain plasma inside a deposition chamber | Tian-Hoe Lim, Huong Nguyen, Dian Sugiarto | 2001-07-10 |
| 6255222 | Method for removing residue from substrate processing chamber exhaust line for silicon-oxygen-carbon deposition process | Himanshu Pokharrna, Tian-Hoe Lim | 2001-07-03 |
| 6218268 | Two-step borophosphosilicate glass deposition process and related devices and apparatus | Ellie Yieh, Maria Galiano, Francimar Campana, Shankar Chandran | 2001-04-17 |
| 6177344 | BPSG reflow method to reduce thermal budget for next generation device including heating in a steam ambient | Richard A. Conti, Maria Galiano, Ellie Yieh | 2001-01-23 |
| 6153261 | Dielectric film deposition employing a bistertiarybutylaminesilane precursor | Ellie Yieh | 2000-11-28 |
| 6114216 | Methods for shallow trench isolation | Ellie Yieh, Srinivas D. Nemani | 2000-09-05 |
| 6099647 | Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films | Ellie Yieh, Paul Edward Gee, Bang Nguyen | 2000-08-08 |
| 5994209 | Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films | Ellie Yieh, Paul Edward Gee, Bang Nguyen | 1999-11-30 |
| 5963840 | Methods for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions | Ellie Yieh, Srinivas D. Nemani | 1999-10-05 |
| 5935340 | Method and apparatus for gettering fluorine from chamber material surfaces | Visweswaren Sivaramakrishnan, Srinivas D. Nemani, Ellie Yieh, Gary Fong | 1999-08-10 |
| 5862057 | Method and apparatus for tuning a process recipe to target dopant concentrations in a doped layer | Ellie Yieh | 1999-01-19 |
| 5812403 | Methods and apparatus for cleaning surfaces in a substrate processing system | Gary Fong, Srinivas D. Nemani, Ellie Yieh | 1998-09-22 |