Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6255222 | Method for removing residue from substrate processing chamber exhaust line for silicon-oxygen-carbon deposition process | Li-Qun Xia, Tian-Hoe Lim | 2001-07-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6255222 | Method for removing residue from substrate processing chamber exhaust line for silicon-oxygen-carbon deposition process | Li-Qun Xia, Tian-Hoe Lim | 2001-07-03 |