Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7117064 | Method of depositing dielectric films | Srinivas D. Nemani, Li-Qun Xia, Dian Sugiarto, Ellie Yieh, Ping Xu +1 more | 2006-10-03 |
| 7001850 | Method of depositing dielectric films | Srinivas D. Nemani, Li-Qun Xia, Dian Sugiarto, Ellie Yieh, Ping Xu +1 more | 2006-02-21 |
| 6764958 | Method of depositing dielectric films | Srinivas D. Nemani, Li-Qun Xia, Dian Sugiarto, Ellie Yieh, Ping Xu +1 more | 2004-07-20 |
| 6521302 | Method of reducing plasma-induced damage | Carsten Schimanke | 2003-02-18 |