Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7700486 | Oxide-like seasoning for dielectric low k films | Sohyun Park, Tzu-Fang Huang, Li-Qun Xia, Hichem M'Saad | 2010-04-20 |
| 7588803 | Multi step ebeam process for modifying dielectric materials | Alexandros T. Demos, Li-Qun Xia, Tzu-Fang Huang | 2009-09-15 |
| 7435685 | Method of forming a low-K dual damascene interconnect structure | Gerardo Delgadino, Yan Ye, Neungho Shin, Yunsang Kim, Li-Qun Xia +6 more | 2008-10-14 |
| 7132369 | Method of forming a low-K dual damascene interconnect structure | Gerardo Delgadino, Yan Ye, Neungho Shin, Yunsang Kim, Li-Qun Xia +6 more | 2006-11-07 |
| 7115508 | Oxide-like seasoning for dielectric low k films | Sohyun Park, Tzu-Fang Huang, Li-Qun Xia, Hichem M'Saad | 2006-10-03 |
| 6699784 | Method for depositing a low k dielectric film (K>3.5) for hard mask application | Li-Qun Xia, Ping Xu, Louis Yang, Tzu-Fang Huang | 2004-03-02 |