Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7319068 | Method of depositing low k barrier layers | Li-Qun Xia, Ping Xu | 2008-01-15 |
| 7125813 | Method of depositing low K barrier layers | Li-Qun Xia, Ping Xu | 2006-10-24 |
| 6849562 | Method of depositing a low k dielectric barrier film for copper damascene application | Chi-I Lang, Li-Qun Xia, Ping Xu | 2005-02-01 |
| 6759327 | Method of depositing low k barrier layers | Li-Qun Xia, Ping Xu | 2004-07-06 |
| 6699784 | Method for depositing a low k dielectric film (K>3.5) for hard mask application | Li-Qun Xia, Ping Xu, Tzu-Fang Huang, Wen Zhu | 2004-03-02 |