Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899763 | Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes | Li-Qun Xia, Tian-Hoe Lim | 2005-05-31 |
| 6528116 | Lid cooling mechanism and method for optimized deposition of low-k dielectric using tri methylsilane-ozone based processes | Li-Qun Xia, Tian-Hoe Lim | 2003-03-04 |