Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902629 | Method for cleaning a process chamber | Yi Zheng, Srinivas D. Nemani, Chen-An Chen, Ju-Hyung Lee, Shankar Venkataraman | 2005-06-07 |
| 6815373 | Use of cyclic siloxanes for hardness improvement of low k dielectric films | Srinivas D. Nemani, Yi Zheng, Lihua Li, Tzu-Fang Huang, Li-Qun Xia +1 more | 2004-11-09 |