Issued Patents All Time
Showing 25 most recent of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322633 | Electrostatic chuck with improved temperature control | Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir Gondhalekar, Wendell Glenn Boyd, Jr., Badri Narayan Ramamurthi +2 more | 2025-06-03 |
| 12203171 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2025-01-21 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Akshay Dhanakshirur +6 more | 2024-05-14 |
| 11495454 | Deposition of low-stress boron-containing layers | Huiyuan Wang, Rick Kustra, Bo Qi, Abhijit Basu Mallick, Kaushik Alayavalli | 2022-11-08 |
| 11408075 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2022-08-09 |
| 11404263 | Deposition of low-stress carbon-containing layers | Huiyuan Wang, Rick Kustra, Bo Qi, Abhijit Basu Mallick, Kaushik Alayavalli | 2022-08-02 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2022-03-15 |
| 10984990 | Electrode assembly | Ramesh Bokka, Jason M. Schaller, Luke Bonecutter | 2021-04-20 |
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Daemian Raj, Dongqing Li, Jingmei Liang, Yizhen Zhang | 2021-03-02 |
| 10916407 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Abdul Aziz Khaja, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez | 2021-02-09 |
| 10663491 | Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same | Zheng John Ye, Juan Carlos Rocha, Abdul Aziz Khaja | 2020-05-26 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2020-03-03 |
| 10510567 | Integrated substrate temperature measurement on high temperature ceramic heater | Yizhen Zhang, Rupankar Choudhury, Jason M. Schaller, Hanish Kumar Panavalappil Kumarankutty | 2019-12-17 |
| 10428426 | Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime | Daemian Raj, Ying Ma, Dongqing Li | 2019-10-01 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Hiroji Hanawa, Jianhua Zhou, Xing Lin, Ren-Guan Duan +11 more | 2019-09-03 |
| 10388549 | On-board metrology (OBM) design and implication in process tool | Khokan Chandra Paul, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Rupankar Choudhury, Shekhar ATHANI +2 more | 2019-08-20 |
| 10192717 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Abdul Aziz Khaja, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez | 2019-01-29 |
| 10113236 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2018-10-30 |
| 10083818 | Auto frequency tuned remote plasma source | Abdul Aziz Khaja, Mohamad A. Ayoub, Ramesh Bokka, Juan Carlos Rocha-Alvarez | 2018-09-25 |
| 9466469 | Remote plasma source for controlling plasma skew | Abdul Aziz Khaja, Mohamad A. Ayoub, Ramesh Bokka, Juan Carlos Rocha-Alvarez | 2016-10-11 |
| 9305749 | Methods of directing magnetic fields in a plasma source, and associated systems | Zheng John Ye, Hiroji Hanawa, Juan Carlos Rocha-Alvarez | 2016-04-05 |
| 9285168 | Module for ozone cure and post-cure moisture treatment | Dmitry Lubomirsky, Kirby H. Floyd, Adib Khan, Shankar Venkataraman | 2016-03-15 |
| 8771538 | Plasma source design | Dmitry Lubomirsky, Jang-Gyoo Yang, Matthew L. Miller, Kien N. Chuc | 2014-07-08 |
| 8742665 | Plasma source design | Dmitry Lubomirsky, Jang-Gyoo Yang, Matthew L. Miller, Kien N. Chuc | 2014-06-03 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Michael R. Rice +10 more | 2013-10-08 |