Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991148 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Brad L. Mays, Douglas A. Buchberger, Jr. | 2018-06-05 |
| 9909213 | Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors | Sergio Fukuda Shoji, Jong Mun Kim, Jason Della Rosa, Ajit Balakrishna | 2018-03-06 |
| 9911579 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Vladimir Knyazik, Jisoo Kim, Wonseok Lee, Usama Dadu | 2018-03-06 |
| 9666466 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Brad L. Mays, Douglas A. Buchberger, Jr. | 2017-05-30 |
| 9639097 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Kartik Ramaswamy, Bryan Liao, Sergio Fukuda Shoji, Duy D. Nguyen +1 more | 2017-05-02 |
| 9610591 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2017-04-04 |
| 9540731 | Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads | James D. Carducci | 2017-01-10 |
| 9412579 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, John Zheng Ye, David H. Quach, Sean S. Kang | 2016-08-09 |
| 9394615 | Plasma resistant ceramic coated conductive article | Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Junhan Yuh, Dmitry Lubomirsky | 2016-07-19 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2016-05-10 |
| 8880227 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Kartik Ramaswamy, Bryan Liao, Sergio Fukuda Shoji, Duy D. Nguyen +1 more | 2014-11-04 |
| 6983892 | Gas distribution showerhead for semiconductor processing | James D. Carducci, Jennifer Y. Sun, Larry D. Elizaga | 2006-01-10 |
| 6863835 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Evans Lee, Hongqing Shan, Siamak Salimian, Paul Luscher +1 more | 2005-03-08 |
| 6831742 | Monitoring substrate processing using reflected radiation | Zhifeng Sui, Hongqing Shan, Nils Johansson, Yu Guan | 2004-12-14 |
| 6797639 | Dielectric etch chamber with expanded process window | James D. Carducci, Evans Lee, Bryan Pu, Hongching Shan, Claes Bjorkman +3 more | 2004-09-28 |
| 6773544 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Evans Lee, Hongqing Shan, Siamak Salimian, Paul Luscher +1 more | 2004-08-10 |
| 6716302 | Dielectric etch chamber with expanded process window | James D. Carducci, Evans Lee, Bryan Pu, Hongching Shan, Claes Bjorkman +3 more | 2004-04-06 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2004-01-13 |
| 6605177 | Substrate support with gas feed-through and method | Richard R. Mett, Robert Greenway | 2003-08-12 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2003-07-01 |
| 6562189 | Plasma reactor with a tri-magnet plasma confinement apparatus | Efrain Quiles, James D. Carducci | 2003-05-13 |
| 6500299 | Chamber having improved gas feed-through and method | Richard R. Mett, Robert Greenway | 2002-12-31 |
| 6481886 | Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system | Kadthala Ramaya Narendrnath, Liang Wang, Shamouil Shamouilian, Paul Luscher | 2002-11-19 |
| 6432259 | Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates | Michael Welch, Siamak Salimian, Paul Luscher, Hongching Shan, Kaushik Vaidya +2 more | 2002-08-13 |
| 6364957 | Support assembly with thermal expansion compensation | Gerhard Schneider, Bryan Pu, Kaushik Vaidya, Brad L. Mays, Hung Dao +2 more | 2002-04-02 |