Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6320736 | Chuck having pressurized zones of heat transfer gas | Shamouil Shamouilian, Arnold Kholodenko, Siamak Salimian, Efrain Quiles, Dennis S. Grimard | 2001-11-20 |
| 6303895 | Method and apparatus for controlling a temperature of a wafer | Anwar Husain | 2001-10-16 |
| 6140612 | Controlling the temperature of a wafer by varying the pressure of gas between the underside of the wafer and the chuck | Anwar Husain | 2000-10-31 |