Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6918218 | External insulated finish system with high density polystyrene layer | — | 2005-07-19 |
| 6605177 | Substrate support with gas feed-through and method | Richard R. Mett, Hamid Noorbakhsh | 2003-08-12 |
| 6500299 | Chamber having improved gas feed-through and method | Richard R. Mett, Hamid Noorbakhsh | 2002-12-31 |
| 5952896 | Impedance matching network | Richard R. Mett, Gabriel Bilek, Ajey M. Joshi | 1999-09-14 |