Issued Patents All Time
Showing 151–175 of 175 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838355 | Damascene interconnect structures including etchback for low-k dielectric materials | Anthony K. Stamper, Edward C. Cooney, III, Jeffrey P. Gambino, John A. Fitzsimmons, Lee M. Nicholson | 2005-01-04 |
| 6831364 | Method for forming a porous dielectric material layer in a semiconductor device and device formed | Stephen E. Greco, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman, Kenneth P. Rodbell +1 more | 2004-12-14 |
| 6831363 | Structure and method for reducing thermo-mechanical stress in stacked vias | Sanjit Das, Brett H. Engel, Brian Herbst, Habib Hichri, Bernd Kastenmeier +8 more | 2004-12-14 |
| 6815329 | Multilayer interconnect structure containing air gaps and method for making | Katherina Babich, Roy A. Carruthers, Alfred Grill, Jeffrey Hedrick, Christopher V. Jahnes +4 more | 2004-11-09 |
| 6815813 | Self-contained heat sink and a method for fabricating same | Kevin S. Petrarca, Michelle L. Steen, Cornelia K. Tsang, Richard P. Volant | 2004-11-09 |
| 6798029 | Method of fabricating micro-electromechanical switches on CMOS compatible substrates | Richard P. Volant, John C. Bisson, Donna R. Cote, Robert A. Groves, Kevin S. Petrarca +2 more | 2004-09-28 |
| 6784485 | Diffusion barrier layer and semiconductor device containing same | Stephan A. Cohen, John A. Fitzsimmons, Stephen M. Gates, Lynne M. Gignac, Paul C. Jamison +5 more | 2004-08-31 |
| 6734096 | Fine-pitch device lithography using a sacrificial hardmask | Minakshisundaran Balasubramanian Anand, Michael D. Armacost, Shyng-Tsong Chen, Stephen M. Gates, Stephen E. Greco +2 more | 2004-05-11 |
| 6724069 | Spin-on cap layer, and semiconductor device containing same | Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman, Christy S. Tyberg | 2004-04-20 |
| 6720249 | Protective hardmask for producing interconnect structures | Christopher V. Jahnes, Joyce C. Liu, Sampath Purushothaman | 2004-04-13 |
| 6657305 | Semiconductor recessed mask interconnect technology | Stephen A. Cohen, John A. Fitzsimmons, Stephen M. Gates, Brian Herbst, Sampath Purushothaman +1 more | 2003-12-02 |
| 6649531 | Process for forming a damascene structure | William J. Cote, Prakash Dev, Daniel C. Edelstein, Scott D. Halle, Gill Yong Lee +1 more | 2003-11-18 |
| 6635506 | Method of fabricating micro-electromechanical switches on CMOS compatible substrates | Richard P. Volant, John C. Bisson, Donna R. Cote, Robert A. Groves, Kevin S. Petrarca +2 more | 2003-10-21 |
| 6617690 | Interconnect structures containing stress adjustment cap layer | Stephen M. Gates, John A. Fitzsimmons | 2003-09-09 |
| 6613484 | Method to decrease fluorine contamination in low dielectric constant films | Bernd Kastenmeier, Theodorus E. Standaert | 2003-09-02 |
| 6551924 | Post metalization chem-mech polishing dielectric etch | John P. Hummel | 2003-04-22 |
| 6548901 | Cu/low-k BEOL with nonconcurrent hybrid dielectric interface | William J. Cote, Daniel C. Edelstein, Stephen M. Gates | 2003-04-15 |
| 6472740 | Self-supporting air bridge interconnect structure for integrated circuits | Brett H. Engel | 2002-10-29 |
| 6451712 | Method for forming a porous dielectric material layer in a semiconductor device and device formed | Stephen E. Greco, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman, Kenneth P. Rodbell +1 more | 2002-09-17 |
| 6387754 | Method of forming an on-chip decoupling capacitor with bottom hardmask | Andrew P. Cowley, Peter A. Emmi, Erdem Kaltalioglu, Vincent J. McGahay | 2002-05-14 |
| 6358832 | Method of forming barrier layers for damascene interconnects | Daniel C. Edelstein, John G. Gaudiello, Mahadevaiyer Krishnan, Sandra G. Malhotra, Maurice McGlashan-Powell +2 more | 2002-03-19 |
| 6278147 | On-chip decoupling capacitor with bottom hardmask | Andrew P. Cowley, Peter A. Emmi, Erdem Kaltalioglu, Vincent J. McGahay | 2001-08-21 |
| 6153935 | Dual etch stop/diffusion barrier for damascene interconnects | Daniel C. Edelstein, John G. Gaudiello, Mahadevaiyer Krishnan, Sandra G. Malhotra, Maurice McGlashan-Powell +2 more | 2000-11-28 |
| 5788869 | Methodology for in situ etch stop detection and control of plasma etching process and device design to minimize process chamber contamination | Ann C. Westerheim, Jamshed Dubash, Marion Garver, Richard A. Bickford | 1998-08-04 |
| 5450205 | Apparatus and method for real-time measurement of thin film layer thickness and changes thereof | Herbert H. Sawin, William T. Conner, Emanuel M. Sachs | 1995-09-12 |