Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5788869 | Methodology for in situ etch stop detection and control of plasma etching process and device design to minimize process chamber contamination | Timothy J. Dalton, Ann C. Westerheim, Jamshed Dubash, Marion Garver | 1998-08-04 |