Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5788869 | Methodology for in situ etch stop detection and control of plasma etching process and device design to minimize process chamber contamination | Timothy J. Dalton, Ann C. Westerheim, Jamshed Dubash, Richard A. Bickford | 1998-08-04 |
| 5492858 | Shallow trench isolation process for high aspect ratio trenches | Amitava Bose, Andre I. Nasr, Steven S. Cooperman | 1996-02-20 |